The structural and optoelectrical properties of TiON/Au/TiON multilayer films

Materials Letters

Volumn 64, Issue 6, 2010, Pages 668-670

  Kim, Daeil ^a  

^a University of Ulsan   (South Korea)

Author keywords

Au; Electrical properties; Optical materials and properties; TiON

Indexed keywords

AU FILM; CARRIER DENSITY; CRYSTALLINITIES; DC MAGNETRON SPUTTERING; ELECTRICAL CONDUCTIVITY; ELECTRICAL PROPERTY; GLASS SUBSTRATES; INTERMEDIATE LAYERS; OPTICAL MATERIALS AND PROPERTIES; OPTICAL TRANSMITTANCE; OPTOELECTRICAL PROPERTIES; OPTOELECTRONIC PROPERTIES; RF-MAGNETRON SPUTTERING; SUBSTRATE HEATING;

CONDUCTIVE FILMS; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; GOLD; GOLD COATINGS; MAGNETRON SPUTTERING; MAGNETRONS; MATERIALS PROPERTIES; OPACITY; OPTICAL MATERIALS; SUBSTRATES;

MULTILAYER FILMS;

EID: 75749151194     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2009.12.032     Document Type: Article

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