IGZO nanoparticle-modified silicon nanowires as extended-gate field-effect transistor pH sensors

Sensors and Actuators, B: Chemical

Volumn 184, Issue , 2013, Pages 27-32

  Lin, Jun Cheng ^a   Huang, Bohr Ran ^a   Yang, Ying Kan ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Extended gate field effect transistor; Indium gallium zinc oxide; pH sensor; Silicon nanowire

Indexed keywords

DISPOSABLE BIOSENSOR; ELECTROLESS ETCHINGS; EXTENDED GATE FIELD EFFECT TRANSISTOR (EGFET); EXTENDED-GATE FIELD-EFFECT TRANSISTORS; HIGH ASPECT RATIO; INDIUM GALLIUM ZINC OXIDES; INDIUM GALLIUM ZINC OXIDES (IGZO); SILICON NANOWIRES;

AMORPHOUS SILICON; ASPECT RATIO; BINDING SITES; BIOSENSORS; CHEMICAL ANALYSIS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NANOPARTICLES; NANOWIRES; PH; SENSORS; SILICON;

PH SENSORS;

EID: 84877322755     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.04.060     Document Type: Article

References (24)

1. S. Kim, T. Rim, K. Kim, U. Lee, E. Baek, H. Lee, C.-K. Baek, M. Meyyappan, M.J. Deen, and J.-S. Lee Silicon nanowire ion sensitive field effect transistor with integrated Ag/AgCl electrode: pH sensing and noise characteristics Analyst 136 2011 5012 5016
2. +-ion sensitive field effect transistor on a glass substrate Sensors and Actuators B 71 2000 106 111 (Pubitemid 32028772)
3. M.H. Asif, O. Nur, M. Willander, and B. Danielsson Selective calcium ion detection with functionalized ZnO nanorods-extended gate MOSFET Biosensors and Bioelectronics 24 2009 3379 3382
4. X.P.A. Gao, G. Zheng, and C.M. Lieber Subthreshold regime has the optimal sensitivity for nanowire FET biosensors Nano Letters 10 2010 547 552
5. J.-S. Noh, H. Kim, B.S. Kim, E. Lee, H.H. Cho, and W. Lee High-performance vertical hydrogen sensors using Pd-coated rough Si nanowires Journal of Materials Chemistry 21 2011 15935 15939
6. J. Yin, X. Qi, L. Yang, G. Hao, J. Li, and J. Zhong A hydrogen peroxide electrochemical sensor based on silver nanoparticles decorated silicon nanowire arrays Electrochimica Acta 56 2011 3884 3889
7. C.-C. Lo, and T.-E. Hsieh Preparation of IGZO sputtering target and its applications to thin-film transistor devices Ceramics International 38 2012 3977 3983
8. 4 films: gas sensor response and stability Sensors and Actuators B 171-172 2012 1166 1171
9. 4 submicron-tubes prepared by polymeric fiber templating route Sensors and Actuators B 160 2011 499 504
10. 2 membrane for pH sensing application Journal of Mechanics in Medicine and Biology 11 2011 959 966
11. H.-H. Li, C.-E. Yang, C.-C. Kei, C.-Y. Su, W.-S. Dai, J.-K. Tseng, P.-Y. Yang, J.-C. Chou, and H.-C. Cheng Coaxial-structured ZnO/silicon nanowires extended-gate field-effect transistor as pH sensor Thin Solid Films 529 2013 173 176
12. T. Qiu, and P.K. Chu Self-selective electroless plating: An approach for fabrication of functional 1D nanomaterials Materials Science and Engineering R 61 2008 59 77 (Pubitemid 351608555)
13. C.Y. Liu, H.Y. Xu, J.G. Ma, X.H. Li, X.T. Zhang, Y.C. Liu, and R. Mu Electrically pumped near-ultraviolet lasing from ZnO/MgO core/shell nanowires Applied Physics Letters 99 2011 063115
14. L. Lin, X. Sun, R. Tao, J. Feng, and Z. Zhang The synthesis and photoluminescence properties of selenium-treated porous silicon nanowire arrays Nanotechnology 22 2011 075203
15. G.H. Kim, H.S. Shin, B.D. Ahn, K.H. Kim, W.J. Park, and H.J. Kim Formation mechanism of solution-processed nanocrystalline InGaZnO thin film as active channel layer in thin-film transistor Journal of the Electrochemical Society 156 2009 H7 H9
16. S.M. Sze Physics of Semiconductor Devices 2nd ed. 1981 Wiley New York
17. P.D. Batista, and M. Mulato ZnO extended-gate field-effect transistors as pH sensors Applied Physics Letters 87 2005 143508
18. 2 sensing membrane Sensors and Actuators B 171-172 2012 238 243
19. B.-R. Huang, J.-C. Lin, and Y.-K. Yang ZnO/silicon nanowire hybrids extended-gate field-effect transistors as pH sensors Journal of the Electrochemical Society 160 6 2013 B78 B82
20. J.-F. Hsu, B.-R. Huang, C.-S. Huang, and H.-L. Chen Silicon nanowires as pH sensor Japanese Journal of Applied Physics 44 2005 2626 2629 (Pubitemid 40892743)
21. A. Fulati, S.M.U. Ali, M. Riaz, G. Amin, O. Nur, and M. Willander Miniaturized pH sensors based on zinc oxide nanotubes/nanorods Sensors 9 2009 8911 8923
22. B.-R. Huang, and J.-C. Lin Core-shell structure of zinc oxide/indium oxide nanorod based hydrogen sensors Sensors and Actuators B 174 2012 389 393
23. S.M. Al-Hilli, R.T. Al-Mofarji, P. Klason, M. Willander, N. Gutman, and A. Sa'ar Zinc oxide nanorods grown on two-dimensional macroporous periodic structures and plane Si as a pH sensor Journal of Applied Physics 103 2008 014302
24. B.-R. Huang, and T.-C. Lin Leaf-like carbon nanotube/nickel composite membrane extended-gate field-effect transistors as pH sensor Applied Physics Letters 99 2011 023108