Temperature coefficient of elastic constants of sputtered TeO2 thin film for zero TCD saw devices

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2005, Pages 1311-1314

  Dewan, Namrata ^b   Tomar, Monika ^b   Sreenivas, K ^b   Gupta, Vinay ^a,b  

^a IEEE

^b UNIVERSITY OF DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE PROPAGATION; ARGON; ELASTIC MODULI; TELLURIUM COMPOUNDS; THERMODYNAMIC STABILITY;

MATERIAL PARAMETERS; TEMPERATURE COEFFICIENT; TEMPERATURE COEFFICIENT OF DELAY (TCD);

THIN FILMS;

EID: 33847099107     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603094     Document Type: Conference Paper

References (12)

1. 2 film overlays", J. Appl. Phys. Vol. 50(3), 1360 (1979).
2. 3"Jpn. J. Appl. Phys., Vol. 40, L471 (2001).
3. 3 for a temperature stable SAW device", J. Phys. D:Appl. Phys., Vol. 36, 1773 (2003).
4. 2 over-layer", Appl. Phys. Lett., Vol. 86, 223508 (2005).
5. G.W. Farnell and E.L. Adler, "Physical Acoustics Principles and Methods", Vol 9, ed. WP Mason and Rn Thurston (Newyork : Academic) chapter 2, p35.
6. A.H. Fahmy and E.L. Adler, "Multilayer acoustic surface wave program" proc. IEE vol. 122, 470 (1975).
7. R.T. Smith and F.S. Welsh, "Temperature dependence of the elastic, piezoelectric and dielectric constants of lithium tantalate and lithium niobate", J. Appl. Phys. Vol. 42, 2219 (1971).
8. 2 single crystal", J. Appl. Phys. 41, 2307 (1970).
9. K. Inoue, K. Sato, "Temperature stability of SAW on langasite single crystals" Proc. IEEE Ultrason. Symp. Vol. 1, 301 (1998).
10. 3 films on sapphire substrates", Jpn. J. Appl. Phys. Vol. 36, 6077 (1997).
11. 2-Si layered structure", Wave Elec. Vol. 3, 35 (1977).
12. G. Bu, D. Ciplys, M. Shur, L.J. Schowalter, S. Schiyman, and R. Gaska, "Temperature coefficient of SAW frequency in single crystal bulk AlN", Electronics Letters Vol. 39 (9), 755 (2003).