Effects of ceramic thin film coating on friction surfaces for surface acoustic wave linear motor

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 1766-1769

  Nakamura, Yuta ^a   Kurosawa, Minoru Kuribayashi ^a   Shigematsu, Takashi ^a   Asai, Katsuhiko ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; CERAMIC MATERIALS; FRICTION; MOTORS; RAYLEIGH SCATTERING; TRANSDUCERS;

INTERDIGITAL TRANSDUCERS; SILICON SLIDERS; SURFACE ACOUSTIC WAVE (SAW) DEVICES;

THIN FILMS;

EID: 3042810985     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. M. Kurosawa, M. Takahashi and T. Higuchi, "Ultrasonic linear motor using surface acoustic wave," IEEE UFFC 43(5), pp. 901-906, 1996.
2. M. Chiba, M. Takahashi, M. Kurosawa and T. Higuchi, "Evaluation of a surface acoustic wave motor output force," MEMS, pp. 250-255, 1997.
3. N. Osakabe, M. Kurosawa, T. Higuchi and O. Shinoura, "Surface acoustic wave linear motor using silicon slider,"MEMS, pp. 390-395, 1998.
4. M. Takasaki, M. K. Kurosawa and T. Higuchi, "Optimum silicon slider design for 50 MHz SAW linear motor," Transducer '99, pp. 1756-1757, 1999.
5. M. K. Kurosawa, H. Itoh, K. Asai, M. Takasaki and T. Higuchi, " Optimization of slider contact face geometry for surface acoustic wave motor," Proc. of MEMS 2001 pp. 252-255, Jan. 21-25, 2001.
6. K. Asai, M. K. Kurosawa and T. Higuchi, " Novel power circulation methods for a surface acoustic wave motor," Proc. of IEEE Ultrason. Symp. '99, pp. 667-670, 1999.
7. T. Shigematsu, M. K. Kurosawa and K. Asai, "Nanometer Stepping Drives of Surface Acoustic Wave Motor," IEEE Trans, on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 40, No. 4, pp. 376-385, 2003
8. Nippon ITF Inc., "Procucts Info.," Available: http://www.nippon-itf.co.jp/products.html