Dependence of precursor composition on patterning and morphology of sol-gel soft lithography based zinc zirconium oxide thin films

Applied Surface Science

Volumn 273, Issue , 2013, Pages 39-48

  Bera, Susanta ^a   Pal, Moumita ^a   Sarkar, Saswati ^a   Jana, Sunirmal ^a  

^a JADAVPUR UNIVERSITY   (India)

Author keywords

Morphology; Sol gel soft lithography; Surface patterning; Thin films

Indexed keywords

ACETONE; CHLORINE COMPOUNDS; FUSED SILICA; II-VI SEMICONDUCTORS; LIME; LITHOGRAPHY; MORPHOLOGY; OPTICAL PROPERTIES; OXIDE FILMS; SOL-GEL PROCESS; SOL-GELS; SOLUTION MINING; SPECTROSCOPIC ANALYSIS; SUBSTRATES; TEXTILE PRINTING; ZINC OXIDE; ZIRCONIA;

FILM CHARACTERISTICS; PRECURSOR COMPOSITION; PRECURSOR SOLUTIONS; SODA-LIME SILICA GLASS; SOFT LITHOGRAPHY; SURFACE PATTERNING; ZINC ACETATE DIHYDRATE; ZIRCONIUM OXYCHLORIDE;

THIN FILMS;

EID: 84876418966     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.01.079     Document Type: Article

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