The patterning of sub-500 nm inorganic oxide and semiconducting polymeric structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7047, Issue , 2008, Pages

  Hampton, Meredith J ^a   Williams, Stuart S ^a   Zhou, Zhilian ^b   Nunes, Janine ^a   Ko, Doo Hyun ^a   Templeton, Joseph L ^a   DeSimone, Joseph M ^a,c   Samulski, Edward T ^a  

^a The University of North Carolina at Chapel Hill   (United States)

^b Liquidia Technologies   (United States)

^c North Carolina State University   (United States)

Author keywords

Conjugated polymer; Inorganic oxide; Perfluoropolyether; Photovoltaics; Soft lithography

Indexed keywords

ABS RESINS; ASPECT RATIO; CADMIUM COMPOUNDS; CONDUCTIVE FILMS; CONDUCTIVE MATERIALS; FILMS; LITHOGRAPHY; MICROSCOPIC EXAMINATION; NANOIMPRINT LITHOGRAPHY; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OPTICAL GLASS; ORGANIC CONDUCTORS; PHOTOVOLTAIC EFFECTS; POLYMER FILMS; POLYMERIC GLASS; POLYMERS; SEMICONDUCTING CADMIUM COMPOUNDS; SEMICONDUCTING FILMS; SEMICONDUCTING INDIUM; SEMICONDUCTING POLYMERS; SULFUR COMPOUNDS; SURFACE CHEMISTRY; SURFACE TENSION; THICK FILMS; WETTING; X RAY ANALYSIS; ZINC OXIDE;

APPLICATIONS.; INITIAL LAYERS; INORGANIC OXIDE; INORGANIC OXIDES; LOW SURFACE ENERGIES; METHOXY; NANOCRYSTALLINE SEMICONDUCTORS; OPTICAL APPLICATIONS; PATTERN REPLICATIONS; PERFLUOROPOLYETHER; PHENYLENE VINYLENES; PHOTOVOLTAICS; POLYMERIC STRUCTURES; POLYTHIOPHENE DERIVATIVES; SECOND LAYERS; SOFT LITHOGRAPHY; TRANSPARENT CONDUCTIVE OXIDES; X-RAY DIFFRACTIONS;

CONDUCTING POLYMERS;

EID: 56249109427     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.794890     Document Type: Conference Paper

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