Three-dimensional patterning and morphological control of porous nanomaterials by gray-scale direct imprinting

Scientific Reports

Volumn 3, Issue , 2013, Pages

  Ryckman, Judson D ^a   Jiao, Yang ^a   Weiss, Sharon M ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOMATERIAL;

ARTICLE; CHEMISTRY; DRUG DELIVERY SYSTEM; HOLOGRAPHY; HUMAN; METHODOLOGY; NANOPORE; NANOTECHNOLOGY; OPTICS; SURFACE PROPERTY;

DRUG DELIVERY SYSTEMS; HOLOGRAPHY; HUMANS; NANOPORES; NANOSTRUCTURES; NANOTECHNOLOGY; OPTICS AND PHOTONICS; SURFACE PROPERTIES;

EID: 84875802142     PISSN: None     EISSN: 20452322     Source Type: Journal    
DOI: 10.1038/srep01502     Document Type: Article

References (49)

1. del Campo, A. & Arzt, E. Fabrication approaches for generating complex micro-and nanopatterns on polymeric surfaces. Chem Rev 108, 911-945 (2008). (Pubitemid 351577854)
2. Geissler, M. & Xia, Y. Patterning: Principles and Some New Developments. Adv Mater 16, 1249-1269 (2004).
3. Guo, C. et al. Grayscale photomask fabricated by laser direct writing in metallic nano-films. Opt. Express 17, 19981-19987 (2009).
4. Fu, Y. Q., Bryan, N. K. A. & Shing, O. N. Diffractive optical elements with continuous relief fabricated by focused ion beam for monomode fiber coupling. Opt. Express 7, 141-147 (2000).
5. Yu, W. X. & Yuan, X. C. Fabrication of refractive microlens in hybrid SiO2/TiO2 sol-gel glass by electron beam lithography. Opt. Express 11, 899-903 (2003).
6. Levy, U. et al. Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography. Opt. Lett. 35, 880-882 (2010).
7. Urquhart, K. S., Stein, R. & Lee, S. H. Computer-Generated Holograms Fabricated by Direct Write of Positive Electron-Beam Resist. Opt. Lett. 18, 308-310 (1993).
8. Yang, J. C. et al. Enhanced Optical Transmission Mediated by Localized Plasmons in Anisotropic, Three-Dimensional Nanohole Arrays. Nano Lett. 10, 3173-3178 (2010).
9. Zentgraf, T., Liu, Y., Mikkelsen, M. H., Valentine, J. & Zhang, X. Plasmonic Luneburg and Eaton lenses. Nat. Nanotechnol. 6, 151-155 (2011).
10. Waits, C., A,M.&Ghodssi, R. Investigation of gray-scale technology for large area 3D siliconMEMSstructures. Journal of Micromechanics and Microengineering 13, 170-177 (2003).
11. Sun, W., Puzas, J. E., Sheu, T. J., Liu, X. & Fauchet, P. M. Nano-to microscale porous silicon as a cell interface for bone-tissue engineering. Adv Mater 19, 921 (2007).
12. Low, S. P., Williams, K. A., Canham, L. T. & Voelcker, N. H. Evaluation of mammalian cell adhesion on surface-modified porous silicon. Biomaterials 27, 4538-4546 (2006). (Pubitemid 43783226)
13. Wei, X. et al. Grating couplers on porous silicon planar waveguides for sensing applications. J. Appl. Phys. 104, 3113 (2008).
14. Ryckman, J.D., Liscidini, M., Sipe, J. E.&Weiss, S. M. Porous silicon structures for low-cost diffraction-based biosensing. Appl. Phys. Lett. 96, 1103 (2010).
15. Cunin, F. et al. Biomolecular screening with encoded porous-silicon photonic crystals. Nat. Mater. 1, 39-41 (2002).
16. Ruffato, G., Romanato, F., Garoli, D. & Cattarin, S. Nanoporous gold plasmonic structures for sensing applications. Opt. Express 19, 13164-13170 (2011).
17. Tasciotti, E. et al.Mesoporous silicon particles as a multistage delivery system for imaging and therapeutic applications. Nat. Nanotechnol. 3, 151-157 (2008). (Pubitemid 351355132)
18. Park, J. H. et al. Biodegradable luminescent porous silicon nanoparticles for in vivo applications. Nat. Mater. 8, 331-336 (2009).
19. Jiao, Y. et al. Patterned nanoporous gold as an effective SERS template. Nanotechnology 22, 5302 (2011).
20. Ryckman, J.D., Liscidini, M., Sipe, J. E.&Weiss, S. M. Direct Imprinting of Porous Substrates: A Rapid and Low-Cost Approach for Patterning Porous Nanomaterials. Nano Lett. 11, 1857-1862 (2011).
21. Sirbuly, D. J., Lowman, G. M., Scott, B., Stucky, G. D. & Buratto, S. K. Patterned microstructures of porous silicon by dry-removal soft lithography. Adv Mater 15, 149 (2003).
22. Khang, D. Y., Yoon, H. & Lee, H. H. Room-Temperature Imprint Lithography. Adv Mater 13, 749-752 (2001). (Pubitemid 32527497)
23. Xia, Y. N. et al. Complex optical surfaces formed by replica molding against elastomeric masters. Science 273, 347-349 (1996).
24. Gates, B. D. et al. New approaches to nanofabrication: Molding, printing, and other techniques. Chem Rev 105, 1171-1196 (2005). (Pubitemid 40600879)
25. Guo, L. J. Nanoimprint Lithography: Methods and Material Requirements. Adv Mater 19, 495-513 (2007). (Pubitemid 46942304)
26. Zaumseil, J. et al. Three-dimensional and multilayer nanostructures formed by nanotransfer printing. Nano Lett. 3, 1223-1227 (2003). (Pubitemid 37206067)
27. Hsu, K. H., Schultz, P. L., Ferreira, P. M. & Fang, N. X. Electrochemical nanoimprinting with solid-state superionic stamps. Nano Lett. 7, 446-451 (2007). (Pubitemid 46383612)
28. Wei, X. &Weiss, S. M. Guided mode biosensor based on grating coupled porous silicon waveguide. Opt. Express 19, 11330-11339 (2011).
29. Jane, A., Dronov, R., Hodges, A. & Voelcker, N. H. Porous silicon biosensors on the advance. Trends Biotechnol 27, 230-239 (2009).
30. Lawrie, J. L., Jiao, Y. & Weiss, S. M. Size-Dependent Infiltration and Optical Detection of Nucleic Acids in Nanoscale Pores. IEEE Trans. Nanotechnol. 9, 596-602 (2010).
31. Velasco, A. E., Friedman, S. G., Pevarnik, M., Siwy, Z. S. & Taborek, P. Pressuredriven flow through a single nanopore. Phys Rev E 86, 025302 (2012).
32. Lang, X. Y., Qian, L. H., Guan, P. F., Zi, J. & Chen, M. W. Localized surface plasmon resonance of nanoporous gold. Appl. Phys. Lett. 98, 093701 (2011).
33. Bok, H. M., Shuford, K. L., Kim, S., Kim, S. K. & Park, S.Multiple surface plasmon modes for a colloidal solution of nanoporous gold nanorods and their comparison to smooth gold nanorods. Nano Lett. 8, 2265-2270 (2008).
34. Yu, F. et al. Simultaneous excitation of propagating and localized surface plasmon resonance in nanoporous gold membranes. Anal Chem 78, 7346-7350 (2006). (Pubitemid 44607583)
35. Sardana, N., Heyroth, F. & Schilling, J. Propagating surface plasmons on nanoporous gold. J Opt Soc Am B 29, 1778-1783 (2012).
36. Ding, Y., Kim, Y. J. & Erlebacher, J. Nanoporous gold leaf: "Ancient technology"/advanced material. Adv Mater 16, 1897-1900 (2004).
37. Qian, L. H., Yan, X. Q., Fujita, T., Inoue, A. & Chen, M. W. Surface enhanced Raman scattering of nanoporous gold: Smaller pore sizes stronger enhancements. Appl. Phys. Lett. 90, 153120 (2007).
38. Lang, X. Y., Chen, L. Y., Guan, P. F., Fujita, T. & Chen, M. W. Geometric effect on surface enhanced Raman scattering of nanoporous gold: Improving Raman scattering by tailoring ligament and nanopore ratios. Appl. Phys. Lett. 94, 213109 (2009).
39. Zheludev, N. I.&Kivshar, Y. S. From metamaterials to metadevices. NatMater 11, 917-924 (2012).
40. Bosman, M., Anstis, G. R., Keast, V. J., Clarke, J. D. & Cortie, M. B. Light Splitting in Nanoporous Gold and Silver. ACS Nano 6, 319-326 (2012).
41. Freese, W., Kämpfe, T., Kley, E.-B. & Tünnermann, A. Design of binary subwavelength multiphase level computer generated holograms. Opt. Lett. 35, 676-678 (2010).
42. Larouche, S., Tsai, Y.-J., Tyler, T., Jokerst, N. & Smith, D. Infrared metamaterial phase holograms. Nat. Mater. 11, 450-454 (2012).
43. Gharghi, M. et al. A Carpet Cloak for Visible Light. Nano Lett. 11, 2825-2828 (2011).
44. Valentine, J., Li, J., Zentgraf, T., Bartal, G. & Zhang, X. An optical cloak made of dielectrics. Nat. Mater. 8, 568-571 (2009).
45. Zentgraf, T., Valentine, J., Tapia, N., Li, J. & Zhang, X. An Optical "Janus" Device for Integrated Photonics. Adv Mater 22, 2561-2564 (2010).
46. Sondergaard, T. et al. Plasmonic black gold by adiabatic nanofocusing and absorption of light in ultra-sharp convex grooves. Nat. Commun. 3, 969 (2012).
47. Lee, S., Shin, J., Lee, Y. H. & Park, J. K. Fabrication of the Funnel-Shaped Three-Dimensional Plasmonic Tip Arrays by Directional Photofluidization Lithography. ACS Nano 4, 7175-7184 (2010).
48. Ciesielski, P. N. et al. Functionalized Nanoporous Gold Leaf Electrode Films for the Immobilization of Photosystem I. ACS Nano 2, 2465-2472 (2008).
49. Schleunitz, A., Guzenko, V. A., Schander, A., Vogler, M. & Schift, H. Selective profile transformation of electron-beamexposed multilevel resist structures based on a molecular weight dependent thermal reflow. J Vac Sci Technol B 29, F302 (2011).