Vanadium oxide micro bolometer with gold black absorbing layer

Optical Engineering

Volumn 51, Issue 7, 2012, Pages

  Wang, Bin ^a,b   Lai, Jianjun ^a,b   Zhao, Erjing ^b   Hu, Haoming ^b   Liu, Qian ^b   Chen, Sihai ^a,b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Gold black; Surface micromachining; Uncooled bolometer

Indexed keywords

ABSORBING LAYERS; BETTER PERFORMANCE; CHOPPER FREQUENCY; FABRICATION PROCESS; GOLD-BLACK; INFRARED WINDOWS; MICRO-BOLOMETERS; UNCOOLED; VANADIUM OXIDES;

BOLOMETERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED DETECTORS; OXIDES; REFLECTION; SURFACE MICROMACHINING;

GOLD;

EID: 84875699790     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.OE.51.7.074003     Document Type: Article

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