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Volumn 22, Issue 1, 2001, Pages 53-58

Micromachined uncooled IR bolometer linear array using VO2 thin films

Author keywords

IR detector; Thin film; Uncooled microbolometer array; Vanadium dioxide

Indexed keywords


EID: 0041781534     PISSN: 01959271     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1010757503003     Document Type: Article
Times cited : (45)

References (8)
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  • 2
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    • Design and performance of the ULTRA 320×240 uncooled focal plane array and sensor
    • R J Herring, P E Howard, "Design and performance of the ULTRA 320×240 uncooled focal plane array and sensor," SPIE, 2746, pp2-12, 1996
    • (1996) SPIE , vol.2746 , pp. 2-12
    • Herring, R.J.1    Howard, P.E.2
  • 4
    • 0030289890 scopus 로고    scopus 로고
    • Infrared focal plane array incorporating silicon IC process compatible bolometer
    • A Tanaka, S Mastsumoto, N Tsukamoto, et al, "Infrared focal plane array incorporating silicon IC process compatible bolometer," IEEE Trans. Electron Devices, 43, pp1844-1848, 1996
    • (1996) IEEE Trans. Electron Devices , vol.43 , pp. 1844-1848
    • Tanaka, A.1    Mastsumoto, S.2    Tsukamoto, N.3
  • 5
    • 0032651257 scopus 로고    scopus 로고
    • Characterization and optimization of infrared poly SiGe bolometers
    • S Sedky, P Fiorini, K Baert, et al, "Characterization and optimization of infrared poly SiGe bolometers," IEEE Trans. Electron Devices, 46, pp675-682, 1999
    • (1999) IEEE Trans. Electron Devices , vol.46 , pp. 675-682
    • Sedky, S.1    Fiorini, P.2    Baert, K.3
  • 6
    • 0029519274 scopus 로고
    • The growth and properties of semiconductor bolometers for infrared detection
    • M H Unewisse, B I Craige, R J Watson, et al, "The growth and properties of semiconductor bolometers for infrared detection," SPIE, 2554, pp43, 1995
    • (1995) SPIE , vol.2554 , pp. 43
    • Unewisse, M.H.1    Craige, B.I.2    Watson, R.J.3
  • 7
    • 0031251538 scopus 로고    scopus 로고
    • A semiconductor YBaCuO microbolometer for room temperature IR imaging
    • A Jahanzeb, C M Travers, Z Celik-Butler, "A semiconductor YBaCuO microbolometer for room temperature IR imaging," IEEE Trans. Electron Devices, 44, pp1795-1801, 1997
    • (1997) IEEE Trans. Electron Devices , vol.44 , pp. 1795-1801
    • Jahanzeb, A.1    Travers, C.M.2    Celik-Butler, Z.3
  • 8
    • 0021122222 scopus 로고
    • Thin-film resistance bolometer IR detectors
    • K C Liddiard, "Thin-film resistance bolometer IR detectors," Infrared Phys. 24, pp57-64, 1984
    • (1984) Infrared Phys. , vol.24 , pp. 57-64
    • Liddiard, K.C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.