Influence of substrate deformation on piezoelectric displacement measurement of piezoelectric film

Ceramics International

Volumn 39, Issue SUPPL.1, 2013, Pages

  Yan, Xingwei ^a   Ren, Wei ^a   Xin, Hong ^a   Shi, Peng ^a   Chen, Xiaofeng ^a   Wu, Xiaoqing ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

A. Films; B. Surfaces; D. PZT; E. Substrates

Indexed keywords

DOUBLE BEAM INTERFEROMETERS; E. SUBSTRATES; LASER INTERFEROMETER; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC FILM; PIEZOELECTRIC RESPONSE; PZT; SUBSTRATE DEFORMATION;

BENDING (DEFORMATION); FINITE ELEMENT METHOD; INTERFEROMETERS; LASER INTERFEROMETRY; PIEZOELECTRICITY;

SUBSTRATES;

EID: 84875699621     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2012.10.140     Document Type: Conference Paper

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