Characterization of composite piezoelectric thick film for MEMS application

Surface and Coatings Technology

Volumn 198, Issue 1-3 SPEC. ISS., 2005, Pages 384-388

  Wang, Zhihong ^a   Zhu, Weiguang ^a   Chao, Chen ^a   Zhao, Changlei ^a   Chen, Xiaofeng ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Composite thick film; Lead zirconate titanate; Piezoelectric coefficient; Sol gel slurry

Indexed keywords

COMPOSITE MATERIALS; ELECTRIC FIELDS; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; SILICON WAFERS; SOL-GELS;

COMPOSITE FILMS; MEMS; SCANNING LASER DOPPLER VIBROMETERS (SLDV); XEROGEL PRECURSOR SOLUTIONS;

THICK FILMS;

PIEZOELECTRICITY;

EID: 20744454469     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.10.104     Document Type: Article

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