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Sensors and Actuators, A: Physical
Volumn 128, Issue 2, 2006, Pages 327-332
Measurement of longitudinal piezoelectric coefficient of film with scanning-modulated interferometer
Author keywords

Piezoelectric coefficient; Scanning interferometer; Thick piezoelectric film
Indexed keywords

INTERFEROMETERS; PIEZOELECTRIC DEVICES; SIGNAL PROCESSING; SURFACE PROPERTIES; VIBRATIONS (MECHANICAL);
EID: 33645965239     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.01.039     Document Type: Article
Times cited : (12)
References (9)
  • 1
    • 5244280905 scopus 로고    scopus 로고
    • Interferometric measurement of electric field-induced displacement in piezoelectric thin films
    • Kholkin A.L., Wutchrich Ch., Taylor D.V., and Setter N. Interferometric measurement of electric field-induced displacement in piezoelectric thin films. Rev. Sci. Instrum. 67 5 (1996) 1935-1941
    • (1996) Rev. Sci. Instrum. , vol.67 , Issue.5 , pp. 1935-1941
    • Kholkin, A.L.1    Wutchrich, Ch.2    Taylor, D.V.3    Setter, N.4
  • 2
    • 0001227925 scopus 로고
    • A sensitive double beam laser interferometer for studying high frequency piezoelectric and electrostrictive strains
    • Pan W.Y., and Cross L.E. A sensitive double beam laser interferometer for studying high frequency piezoelectric and electrostrictive strains. Rev. Sci. Instrum. 60 8 (1989) 2701-2705
    • (1989) Rev. Sci. Instrum. , vol.60 , Issue.8 , pp. 2701-2705
    • Pan, W.Y.1    Cross, L.E.2
  • 3
    • 0000925361 scopus 로고
    • Simple, high-resolution interferometer for the measurement of frequency dependent complex piezoelectric response in ferroelectric ceramics
    • Li J.F., Moses P., and Viehland D. Simple, high-resolution interferometer for the measurement of frequency dependent complex piezoelectric response in ferroelectric ceramics. Rev. Sci. Instrum. 66 1 (1995) 215-221
    • (1995) Rev. Sci. Instrum. , vol.66 , Issue.1 , pp. 215-221
    • Li, J.F.1    Moses, P.2    Viehland, D.3
  • 4
    • 10844236256 scopus 로고    scopus 로고
    • Modulated laser interferometer with picometer resolution for piezoelectric characterization
    • Chao C., Wang Z., and Zhu W. Modulated laser interferometer with picometer resolution for piezoelectric characterization. Rev. Sci. Instrum. 75 11 (2004) 4641-4645
    • (2004) Rev. Sci. Instrum. , vol.75 , Issue.11 , pp. 4641-4645
    • Chao, C.1    Wang, Z.2    Zhu, W.3
  • 5
    • 0037289708 scopus 로고    scopus 로고
    • Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer
    • Yao K., and Tay F.E.H. Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer. IEEE Trans Ultrason. Ferroelectr. Freq. Control. 50 2 (2003) 113-116
    • (2003) IEEE Trans Ultrason. Ferroelectr. Freq. Control. , vol.50 , Issue.2 , pp. 113-116
    • Yao, K.1    Tay, F.E.H.2
  • 6
    • 2142721039 scopus 로고    scopus 로고
    • Characterisation of piezoelectric thin films by areal laser scanning
    • Yao K., Shannigrahi S., and Tay F.E.H. Characterisation of piezoelectric thin films by areal laser scanning. Sens. Actuators A112 (2004) 127-133
    • (2004) Sens. Actuators , vol.A112 , pp. 127-133
    • Yao, K.1    Shannigrahi, S.2    Tay, F.E.H.3
  • 7
    • 20744454469 scopus 로고    scopus 로고
    • Characterization of composite piezoelectric thick film for MEMS application
    • Wang Z., Zhu W., Chao C., Zhao C., and Chen X. Characterization of composite piezoelectric thick film for MEMS application. Surf. Coat. Technol. 198 1-3 (2005) 384-388
    • (2005) Surf. Coat. Technol. , vol.198 , Issue.1-3 , pp. 384-388
    • Wang, Z.1    Zhu, W.2    Chao, C.3    Zhao, C.4    Chen, X.5
  • 8
    • 0342656206 scopus 로고    scopus 로고
    • Laser interferometry for piezoelectric materials study-possibilities and limits
    • Šulc M., and Barošová D. Laser interferometry for piezoelectric materials study-possibilities and limits. Ferroelectrics 224 1-4 (1999) 129-136
    • (1999) Ferroelectrics , vol.224 , Issue.1-4 , pp. 129-136
    • Šulc, M.1    Barošová, D.2
  • 9
    • 1242304944 scopus 로고    scopus 로고
    • Low temperature sintering of piezoelectric thick films derived from a novel sol-gel route
    • Zhu W., Wang Z., Zhao C., Tan O., and Hng H. Low temperature sintering of piezoelectric thick films derived from a novel sol-gel route. Jpn. J. Appl. Phys. 41 11B (2002) 6969-6975
    • (2002) Jpn. J. Appl. Phys. , vol.41 , Issue.11 B , pp. 6969-6975
    • Zhu, W.1    Wang, Z.2    Zhao, C.3    Tan, O.4    Hng, H.5

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.