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Volumn 493, Issue 1-2, 2005, Pages 313-318

Measurement of longitudinal piezoelectric coefficient of lead zirconate titanate thin/thick films using a novel scanning Mach-Zehnder interferometer

Author keywords

Lead zirconate titanate; Piezoelectric effect; Scanning interferometry; Sol gel

Indexed keywords

MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; SOL-GELS; THICK FILMS; THIN FILMS;

LEAD ZIRCONATE TITANATE (PZT); PIEZOELECTRIC COEFFICIENTS;

LEAD COMPOUNDS;

EID: 27144474749 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.08.005 Document Type: Article

Times cited : (17)

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