Composite polysilicon-platinum lateral nanoelectromechanical relays

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 7-10

  Parsa, R ^a   Chong, S ^a   Patil, N ^a   Akarvardar, K ^a,b   Provine, J ^a   Lee, D ^a   Elata, D ^a,c   Mitra, S ^a   Wong, H S P ^a   Howe, R T ^a  

^a Stanford University   (United States)

^b SEMATECH   (United States)

^c TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; LITHOGRAPHY; MICROSYSTEMS; PLATINUM; POLYSILICON;

BEAM STRUCTURES; CONTACT MATERIAL; LOCAL ROUTING; MECHANICAL AND ELECTRICAL PROPERTIES; NANO-ELECTROMECHANICAL;

SOLID-STATE SENSORS;

EID: 84875454099     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2010.2     Document Type: Conference Paper

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