A harsh environment wireless pressure sensing solution utilizing high temperature electronics

Sensors (Switzerland)

Volumn 13, Issue 3, 2013, Pages 2719-2734

  Yang, Jie ^a,b  

^a NORTHEASTERN UNIVERSITY   (China)

^b Arkansas Power Electronics International Inc   (United States)

Author keywords

Harsh environment; High temperature; Pressure sensor; Silicon carbide; Wireless

Indexed keywords

HARSH ENVIRONMENT; HIGH TEMPERATURE; HIGH-TEMPERATURE ELECTRONICS; MEMS PRESSURE SENSOR; REAL-TIME HEALTH MONITORING; SEMICONDUCTOR PRODUCTS; SILICON CARBIDES (SIC); WIRELESS TRANSMI-SSION MODULES;

DESIGN; RADIO; SEMICONDUCTOR DEVICES; SIGNAL PROCESSING; SILICON CARBIDE;

PRESSURE SENSORS;

ARTICLE; ELECTRONICS; ENVIRONMENTAL MONITORING; EQUIPMENT DESIGN; HEAT; HUMAN; MICROELECTROMECHANICAL SYSTEM; PRESSURE; SOLUTION AND SOLUBILITY; WIRELESS COMMUNICATION;

ELECTRONICS; ENVIRONMENTAL MONITORING; EQUIPMENT DESIGN; HOT TEMPERATURE; HUMANS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; PRESSURE; SOLUTIONS; WIRELESS TECHNOLOGY;

EID: 84875149909     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s130302719     Document Type: Article

References (57)

1. Middleton, W.E.K. The place of torricelli in the history of the barometer. Isis 1963, 54, 11-28.
2. Middleton, W.E.K.; Brown, S.C. The history of the barometer. Phys. Today 1964, 17, 68.
3. Rolfe, C.W. Use of the aneroid barometer in geological surveying. J. Geol. 1895, 3, 128-137.
4. Bridgman, P.W. The measurement of high hydrostatic pressure, I. A simple primary gauge. Proc. Am. Acad. Sci. 1909, 44, 201-217.
5. Leck, J.H. Pressure Measurement in Vacuum Systems; Institute of Physics: London, UK, 1957.
6. Benedict, R.P. The response of a pressure-sensing system. J. Basic Eng. 1960, 82, 482-488.
7. Milligan, R.V. The effects of high pressure on foil strain gages. Exp. Mech. 1964, 4, 25-36.
8. Thomas, M.D.; Piemme, E. Pressure measurement: Electrical pressure transducers. Prog. Cardiovasc. Dis. 1963, 5, 574-594.
9. Eaton, W.P.; Smith, J.H. Micromachined pressure sensors: Review and recent developments. Smart Mater. Struct. 1999, 6, 530-539.
10. Sander, C.S.; Knutti J.W.; Meindl. J. D. A monolithic capacitive pressure sensor with pulse-period output. IEEE Trans. Electron. Dev. 1980, 27, 927-930.
11. Lee, Y.S.; Wise, K.D. A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity. IEEE Trans. Electron. Dev. 1982, 29, 42-48.
12. Puers, B.; Peeters, E.; Van Den Bossche, A.; Sansen, W. A capacitive pressure sensor with low impedance output and active suppression of parasitic effects. Sens. Actuators A Phys. 1990, 21, 108-114.
13. Mastrangelo, C.H.; Zhang, X.; Tang, W.C. Surface-micromachined capacitive differential pressure sensor with lithographically defined silicon diaphragm. J. Microelectro. Syst. 1996, 5, 98-105.
14. Gavrilenko, T.P.; Nikolaev, Y.A. Piezoelectric pressure transducer. Combust. Expl. Shock Waves 1982, 18, 378-380.
15. Morten, B.; De Cicco, G.; Prudenziati, M. Resonant pressure sensor based on piezoelectric properties of ferroelectric thick films. Sens. Actuators A Phys. 1992, 31, 153-158.
16. Tressler, J.F.; Alkoy, S.; Newnham, R.E. Piezoelectric sensors and sensor materials. J. Electroceram. 1998, 2, 257-272.
17. Gautschi, G. Piezoelectric Sensorics: Force, Strain, Pressure, Acceleration and Acoustic Emission Sensors, Materials and Amplifiers; Springer: New York, NY, USA, 2006.
18. Besson, R.J.; Boy, J.J.; Glotin, B.; Jinzaki, Y.; Sinha, B.; Valdois, M. A dual-mode thickness-shear quartz pressure sensor. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 1993, 40, 584-591.
19. Reeder, T.M.; Cullen, D.E. Surface-acoustic-wave pressure and temperature sensors. IEEE Proc. 1976, 64, 754-756.
20. Drafts, B. Acoustic wave technology sensors. IEEE Trans. Microwave Theory Tech. 2001, 49, 795-802.
21. Scherr, H.; Scholl, G.; Seifert, F.; Weigel, R. Quartz Pressure Sensor based on SAW Reflective Delay Line. In Proceedings of the IEEE Ultrasonics Symposium, San Antonio, TX, USA, 3-6 November 1996; pp. 347-350.
22. Schimetta, G.; Dollinger, F.; Weigel, R. A wireless pressure-measurement system using a SAW hybrid sensor. IEEE Trans. Microwave Theory Tech. 2000, 48, 2730-2735.
23. Risch M R. Precision pressure sensor using quartz SAW resonators. Sens. Actuat. 1984, 6, 127-133.
24. Xu, M.G.; Reekie, L.; Chow, Y.T.; Dakin, J.P. Optical in-fibre grating high pressure sensor. Electron. Lett. 1993, 29, 398-399.
25. Fields, J.N.; Asawa, C.K.; Ramer, O.G.; Barnoski, M.K. Fiber optic pressure sensor. J. Acoust. Soc. Am. 1980, 67, 816.
26. Abeysinghe, D.C.; Dasgupta, S.; Boyd, J.T.; Jackson, H.E. A novel MEMS pressure sensor fabricated on an optical fiber. IEEE Photon. Technol. Lett. 2001, 13, 993-995.
27. Zhang, Y.; Feng, D.; Liu, Z.; Guo, Z.; Dong, X.; Chiang, K.S.; Chu, B.C. High-sensitivity pressure sensor using a shielded polymer-coated fiber Bragg grating. IEEE Photon. Technol. Lett. 2001, 13, 618-619.
28. Zhu, Y.; Wang, A. Miniature fiber-optic pressure sensor. Photon. Technol. Lett. IEEE 2005, 17, 447-449.
29. Wang, A.; He, S.; Fang, X.; Jin, X.; Lin, J. Optical fiber pressure sensor based on photoelasticity and its application. J. Lightwave Technol. 1992. 10, 1466-1472.
30. Mosser, V.; Suski, J.; Goss J.; Obermeier, E. Piezoresistive pressure sensors based on polycrystalline silicon. Sens. Actuators A Phys. 1991, 28, 113-132.
31. Ansermet, S.; Otter, D.; Craddock, R.W.; Dancaster, J.L. Cooperative development of a piezoresistive pressure sensor with integrated signal conditioning for automotive and industrial applications. Sens. Actuators A Phys. 1990, 21, 79-83.
32. Ishihara, T.; Suzuki, K.; Suwazono, S.; Hirata M.; Tanigawa, H. CMOS integrated silicon pressure sensor. IEEE J. Solid State Circ. 1987, 22, 151-156.
33. Yamada, K.; Nishihara, M.; Kanzawa, R.; Kobayashi R. A piezoresistive integrated pressure sensor. Sens. Actuators 1983, 4, 63-69.
34. Okojie, R.S.; Ned, A.A.; Kurtz A D. Operation of α (6H)-SiC pressure sensor at 500 C. Sens. Actuators A Phys. 1998, 66, 200-204.
35. Ziermann, R.; Von Berg, J.; Reichert, W.; Obermeier, E.; Eickhoff, M.; Krotz, G. A High Temperature Pressure Sensor with β-SiC Piezoresistors on SOI Substrates. In Proceedings of IEEE International Conference on Solid State Sensors and Actuators, Chicago, IL, USA, 16-19 June 1997; pp. 1411-1414.
36. Young, D.J.; Du, J.; Zorman, C.A.; Ko, W.H. High-temperature single-crystal 3C-SiC capacitive pressure sensor. IEEE Sens. J. 2004, 4, 464-470.
37. Chen, L.; Mehregany, M. A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement. Sens. Actuators A Phys. 2008, 145, 2-8.
38. Eaton, W.P.; Smith, J.H. Micromachined pressure sensors: Review and recent developments. Proc. SPIE 1997, 3046, 30-41.
39. Obermeier, E. High Temperature Microsensors Based on Polycrystalline Diamond Thin Films. In Proceedings of 8th International Conference on Solid State Sensors and Actuators, Stockholm, Sweden, 25-29 June 1995; pp. 178-181.
40. New High Temperature SOI Electronics Extends the Temperature Range of Pressure Transducers. Available online: http://www.kulite.com/docs/products_overview/SOIRelease.pdf (accessed on 19 February 2013).
41. High-Temperature Pressure Transducers. Available online: http://www51.honeywell.com/aero/common/documents/myaerospacecatalog-documents/MissilesMunitions/High_Temperature_Pressure_Transducer_from_Sensors_Magazine.pdf (accessed on 12 January 2013).
42. Zhu, Y.; Cooper, K.L.; Pickrell, G.R.; Wang, A. High-temperature fiber-tip pressure sensor. J. Lightwave Technol. 2006, 24, 861-869.
43. Wang, X.; Xu, J.; Zhu, Y.; Cooper, K.L.; Wang, A. All-fused-silica miniature optical fiber tip pressure sensor. Opt. Lett. 2006, 31, 885-887.
44. Berthold, J.; Ghering, W.; Varshneya, D. Design and characterization of a high temperature fiber-optic pressure transducer. J. Lightwave Technol. 1987, 5, 870-876.
45. Pulliam, W.; Russler, P.M.; Fielder, R.S. High-temperature high-bandwidth fiber optic MEMS pressure-sensor technology for turbine engine component testing. Proc. SPIE 2002, 4578, 229-238.
46. Xiao, H.; Zhao, W.; Lockhart, R.; Wang, J.; Wang, A. Absolute sapphire optical fiber sensor for high-temperature applications. Proc. SPIE 1998, 3201, 36-42.
47. Xu, J.; Pickrell, G.; Wang, X.; Peng, W.; Cooper, K.; Wang, A. A novel temperature-insensitive optical fiber pressure sensor for harsh environments. IEEE Photon. Technol. Lett. 2005, 17, 870-872.
48. Trang, H.; Marie-Helene, V.; Jean-Sebastien, D.; Philippe, R.; Philippe, B.; Pierre, L.A. Temperature-Compensated Structure for SAW Pressure Sensor in Very High Temperature. In Proceedings of IEEE International Frequency Control Symposium 2007 Joint with the 21st European Frequency and Time Forum, Geneva, Switzerland, 29 May-1 June 2007; pp. 40-44.
49. Fonseca, M.A.; English, J.M.; Von Arx, M.; Allen, M.G. Wireless micromachined ceramic pressure sensor for high-temperature applications. J. Microelectromechan. Syst. 2002, 11, 337-343.
50. Akar, O.; Akin, T.; Najafi, K. A wireless batch sealed absolute capacitive pressure sensor. Sens. Actuators A Phys. 2001, 95, 29-38.
51. Harris, G.L. Properties of Silicon Carbide; Institution of Engineering and Technology: London, UK, 1995.
52. Lathi, B.P. Modern Digital and Analog Communication Systems; Oxford University Press: Oxford, UK, 1998.
53. Sklar, B. Digital Communications: Fundamentals and Applications; Prentice-Hall: Upper Saddle River, NJ, USA, 2001.
54. Yang, J.; Fraley, J.R.; Western, B.; Schupbach, M.; Lostetter, A.B. Characterization of SiC JFETs and its application in extreme temperature circuit design. Mater. Sci. Forum 2010, 647, 949-953.
55. Super High Temperature Is® Pressure Transducer XTEH-10L-190 (M) SERIES. Available online: http://www.kulite.com/docs/products/XTEH-10L-190.pdf (accessed on 19 January 2013).
56. Hickman, I. Practical RF Handbook; Elsevier Ltd.: Oxford, UK, 2007.
57. Lee, T.H. The Design of CMOS Radio-Frequency Integrated Circuits; Cambridge University Press: Cambridge, UK, 1998.