One-step sculpting of silicon microstructures from pillars to needles for water and oil repelling surfaces

Journal of Micromechanics and Microengineering

Volumn 23, Issue 2, 2013, Pages

  Susarrey Arce, A ^a   Marin A G ^a   Schlautmann, S ^a   Lefferts, L ^a   Gardeniers, J G E ^a   Van Houselt, A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

LOADING CONDITION; MICROFABRICATION METHODS; PHOTOLITHOGRAPHIC MASKS; PROCESS CONDITION; REACTIVE ETCHING; SILICON MICROSTRUCTURES; SILICON SURFACES; SUPERHYDROPHOBIC;

CONTACT ANGLE; MICROSTRUCTURE; PLASMA ETCHING; SILICON; SULFUR HEXAFLUORIDE;

LOADING;

EID: 84874409847     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/2/025004     Document Type: Article

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