Erosion evolution in mono-crystalline silicon surfaces caused by acoustic cavitation bubbles

Journal of Applied Physics

Volumn 113, Issue 6, 2013, Pages

  Fernandez Rivas, David ^a   Betjes, Joris ^a   Verhaagen, Bram ^b   Bouwhuis, Wilco ^b   Bor, Ton C ^b   Lohse, Detlef ^b   Gardeniers, Han J G E ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC CAVITATIONS; AXISYMMETRY; BOUNDARY INTEGRAL METHODS; CAVITATION BUBBLE; COLLAPSING BUBBLE; CRYSTALLOGRAPHIC ORIENTATIONS; DIFFERENT SUBSTRATES; ERODED AREAS; EROSION DAMAGE; EXPOSED TO; INCUBATION PERIODS; NUMBER OF PITS; SILICON SUBSTRATES; SILICON SURFACES; SPHERICAL BUBBLES; ULTRASOUND SIGNAL;

CAVITATION; SILICON;

EROSION;

EID: 84874337545     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4791582     Document Type: Article

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