Silicon MEMS components: A fatigue life assessment approach

Microsystem Technologies

Volumn 11, Issue 2-3, 2005, Pages 129-134

  Varvani Farahani, A ^a  

^a RYERSON UNIVERSITY   (Canada)

Author keywords

Critical planes; Fatigue damage analysis; Microelectromechanical system (MEMS); Silicon micro components

Indexed keywords

CRACK INITIATION; DURABILITY; FATIGUE OF MATERIALS; FRACTURE; SILICON; SURFACE PHENOMENA;

CRITICAL PLANES; FATIGUE DAMAGE ANALYSIS; MICROELECTROMECHANICAL SYSTEMS (MEMS); SILICON MICRO-COMPONENTS;

MICROELECTROMECHANICAL DEVICES;

EID: 24044487938     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0472-6     Document Type: Article

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