15.4: Excellent performance of indium-oxide-based thin-film transistors by DC sputtering

Digest of Technical Papers - SID International Symposium

Volumn 40, Issue 1, 2009, Pages 191-193

  Lee, Ming Hsien ^a   Shih, Ching Chieh ^a   Chen, Jim Shone ^a   Huang, Wei Ming ^a   Gan, Feng Yuan ^a   Shih, Yi Chi ^b   Qiu, Cindy X ^c   Shih, I Shiang ^c  

^a AU OPTRONICS CORPORATION   (Taiwan)

^b CIS Scientific Inc ^*  (Canada)

^c CIS Scientific Inc   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; INDIUM COMPOUNDS; TEMPERATURE; THIN FILM CIRCUITS;

ACTIVE LAYER; DC SPUTTERING; HIGH MOBILITY; LOW- TEMPERATURE PROCESS; ON STATE CURRENT; ON/OFF CURRENT RATIO; TEMPERATURE SENSITIVE SUBSTRATES; TRANSPARENT OXIDES;

THIN FILM TRANSISTORS;

EID: 84872618409     PISSN: 0097966X     EISSN: 21680159     Source Type: Conference Proceeding    
DOI: 10.1889/1.3256729     Document Type: Conference Paper

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