Sensitivity improvement of free-standing porous silicon rugate filters for isopropanol vapor detection by applying lateral pressure differences

Sensors and Actuators, B: Chemical

Volumn 176, Issue , 2013, Pages 437-442

  Park, Seon Hwa ^a   Kim, Young You ^b   Lee, Ki Won ^b  

^a Korea Research Institute of Standards and Science   (South Korea)

^b Kongju National University   (South Korea)

Author keywords

Free standing porous silicon rugate filter; Gas sensor; Lateral pressure difference; Organic vapor; Porous silicon; Sensitivity

Indexed keywords

BANDPASS FILTERS; CHEMICAL SENSORS; SILICON;

ISO-PROPANOL VAPORS; LATERAL PRESSURES; ORGANIC VAPORS; PRESSURE DIFFERENCES; RUGATE FILTER; SENSITIVITY; SENSITIVITY IMPROVEMENTS; VAPOR CONCENTRATIONS;

POROUS SILICON;

EID: 84872528010     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.09.045     Document Type: Article

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