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Volumn 47, Issue SUPPL. 3, 2005, Pages
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Porous silicon as pressure sensing material
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Author keywords
Piezoresistive coefficient; Porous silicon; Pressure sensing
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Indexed keywords
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EID: 29444456916
PISSN: 03744884
EISSN: None
Source Type: Journal
DOI: None Document Type: Conference Paper |
Times cited : (8)
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References (10)
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