Electro-optical porous silicon gas sensor with enhanced selectivity

Sensors and Actuators, B: Chemical

Volumn 147, Issue 1, 2010, Pages 100-104

  Jalkanen, Tero ^a   Tuura, Jaani ^a   Mäkilä, Ermei ^a   Salonen, Jarno ^a  

^a UNIVERSITY OF TURKU   (Finland)

Author keywords

Gas sensing; Interference filters; Porous silicon; Selectivity

Indexed keywords

ELECTRICAL AND OPTICAL PROPERTIES; ELECTRO-OPTICAL; GAS SENSING; GAS SENSORS; HYGROSCOPIC PROPERTIES; INTERFERENCE FILTERS; OPTICAL INTERFERENCE; POROUS SILICON GAS SENSORS; RAPID RESPONSE; RELATIVE HUMIDITIES; SENSOR STRUCTURES;

ATMOSPHERIC HUMIDITY; CHEMICAL DETECTION; CHEMICAL SENSORS; DIMETHYLFORMAMIDE; ELECTRIC PROPERTIES; ETHANOL; GAS DETECTORS; GASES; OPTICAL PROPERTIES;

POROUS SILICON;

EID: 77953131904     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.03.005     Document Type: Article

References (22)

1. Sahner K., Hagen G., Schönauer D., Reiß S., and Moos R. Zeolites-Versatile materials for gas sensors. Solid State Ionics 179 (2008) 2416-2423
2. Gao Y., Li X., Gong J., Fan B., Su Z., and Qu L. Polyaniline nanotubes prepared using fiber mats membrane as the template and their gas-response behaviour. J. Phys. Chem. C 112 (2008) 8215-8222
3. Kauffman D.R., and Star A. Carbon nanotube gas and vapor sensors. Angew. Chem. Int. Ed. 47 (2008) 6550-6570
4. 2 nanotubes. Sens. Actuators, B 137 (2009) 513-520
5. Herino R., Bomchil G., Barla K., Bertrand C., and Ginoux J.L. Porosity and pore size distributions of porous silicon layers. J. Electrochem. Soc. 134 (1987) 1994-2000
6. Barillaro G., Bruschi P., Pieri F., and Strambini L.M. CMOS-compatible fabrication of porous silicon gas sensors and their readout electronics on the same chip. Phys. Status Solidi A 204 (2007) 1423-1428
7. Foucaran A., Pascal-Delannoy F., Giani A., Sackda A., Combette P., and Boyer A. Porous silicon layers used for gas sensor applications. Thin Solid Films 297 (1997) 317-320
8. Salonen J., Tuura J., Björkqvist M., and Lehto V.-P. Sub-ppm trace moisture detection with a simple thermally carbonized porous silicon sensor. Sens. Actuators, B 114 (2006) 423-426
9. Snow P.A., Squire E.K., Russell P.St.J., and Canham L.T. Vapor sensing using the optical properties of porous silicon Bragg mirrors. J. Appl. Phys. 86 (1999) 1781-1784
10. Salem M.S., Sailor M.J., Fukami K., Sakka T., and Ogata Y.H. Sensitivity of porous silicon rugate filters for chemical vapor detection. J. Appl. Phys. 103 (2008) 083516
11. Létant S.E., Content S., Tan T.T., Zenhausern F., and Sailor M.J. Integration of porous silicon chips in an electronic artificial nose. Sens. Actuators, B 69 (2000) 193-198
12. Baratto C., Faglia G., Sberveglieri G., Gaburro Z., Pancheri L., Oton C., and Pavesi L. Multiparametric porous silicon sensors. Sensors 2 (2002) 121-126
13. Jalkanen T., Torres-Costa V., Salonen J., Björkqvist M., Mäkilä E., Martínez-Duart J.M., and Lehto V.-P. Optical gas sensing properties of thermally hydrocarbonized porous silicon Bragg reflectors. Opt. Express 7 (2009) 5446-5456
14. Salonen J., Björkqvist M., Laine E., and Niinistö L. Stabilization of porous silicon surface by thermal decomposition of acetylene. Appl. Surf. Sci. 225 (2004) 389-394
15. Björkqvist M., Salonen J., and Laine E. Humidity behaviour of thermally carbonized porous silicon. Appl. Surf. Sci. 222 (2004) 269-274
16. Yon J.J., Barla K., Herino R., and Bomchil G. The kinetics and mechanism of oxide layer formation from porous silicon formed on p-Si substrates. J. Appl. Phys. 62 (1987) 1042-1048
17. Salonen J., Mäkilä E., Riikonen J., Heikkilä T., and Lehto V.-P. Controlled enlargement of pores by annealing of porous silicon. Phys. Status Solidi A 206 (2009) 1313-1317
18. Torres-Costa V., Salonen J., Jalkanen T., Lehto V.-P., Martín-Palma R.J., and Martínez-Duart J.M. Carbonization of porous silicon optical gas sensors for enhanced stability and sensitivity. Phys. Status Solidi A 206 (2009) 1306-1308
19. Sing K.S.W., Everett D.H., Haul R.A.W., Moscou L., Pierotti R.A., Rouquérol J., and Siemieniewska T. Reporting Physisorption data for gas/solid systems with special reference to the determination of surface area and porosity. Pure Appl. Chem. 57 (1985) 603-619
20. Paski J., Björkqvist M., Salonen J., and Lehto V.-P. Effects of treatment temperature on thermally-carbonized [sic] porous silicon hygroscopicity. Phys. Status Solidi C 2 (2005) 3379-3383
21. Björkqvist M., Paski J., Salonen J., and Lehto V.-P. Studies on hysteresis reduction in thermally carbonized porous silicon humidity sensor. IEEE Sens. J. 6 (2006) 542-547
22. Tuura J., Björkqvist M., Salonen J., and Lehto V.-P. Electrically isolated thermally carbonized porous silicon layer for humidity sensing purposes. Sens. Actuators, B 131 (2008) 627-632