Optical study of defects in nano-diamond films grown in linear antenna microwave plasma CVD from H2/CH4/CO2 gas mixture

Physica Status Solidi (B) Basic Research

Volumn 249, Issue 12, 2012, Pages 2635-2639

  Varga, M ^a,b   Remes, Z ^a   Babchenko, O ^a   Kromka, A ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

Nanocrystalline diamond; Optical spectroscopy; Pulsed linear plasma CVD; Wide band gap semiconductors

Indexed keywords

ABSORPTION SPECTROSCOPY; BOROSILICATE GLASS; DIAMOND FILMS; ENERGY GAP; GAS MIXTURES; GASES; GRAIN BOUNDARIES; INFRARED DEVICES; IONIZATION OF GASES; LIGHT ABSORPTION; MICROWAVES; NANOCRYSTALS; NANODIAMONDS; PHOTOIONIZATION; SCANNING ANTENNAS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; WIDE BAND GAP SEMICONDUCTORS;

BOROSILICATE GLASS SUBSTRATES; LINEAR PLASMA; NANO-CRYSTALLINE DIAMONDS; NANOCRYSTALLINE DIAMOND FILMS; OPTICAL SPECTROSCOPY; PHOTOCURRENT SPECTROSCOPY; PHOTOIONIZATION THRESHOLD; PHOTOTHERMAL DEFLECTION SPECTROSCOPY;

PLASMA CVD;

EID: 84872394041     PISSN: 03701972     EISSN: 15213951     Source Type: Journal    
DOI: 10.1002/pssb.201200154     Document Type: Article

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