Fabrication of micro- and submicrometer silver patterns by microcontact printing of mercaptosilanes and direct electroless metallization

Microelectronic Engineering

Volumn 104, Issue , 2013, Pages 100-104

  Mondin, Giovanni ^a   Schumm, Benjamin ^a   Fritsch, Julia ^a   Grothe, Julia ^a   Kaskel, Stefan ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Electroless plating; Mercaptosilane; Metallization; Microcontact printing; Patterning; Silver

Indexed keywords

3-MERCAPTOPROPYLTRIETHOXYSILANE; ELECTROLESS METALLIZATION; GLASS SUBSTRATES; LATERAL DIMENSION; MERCAPTOSILANE; METALLIC PATTERNS; METALLIZATION PROCESS; MICRO CONTACT PRINTING; PATTERNING; PATTERNING METHODS; SELECTIVE DEPOSITION; SUB-MICROMETER PATTERNS; SUBMICROMETERS; SUBMICRON SCALE; TRANSPARENT ELECTRODE;

ELECTROLESS PLATING; FABRICATION; METALLIZING; MICROELECTRONICS; PRINTING; SILVER; SUBSTRATES;

ELECTRON DEVICE MANUFACTURE;

EID: 84872384800     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.11.022     Document Type: Article

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