Pd-Ni-P metallic glass pattern with controllable microstructure fabricated by electroless alloy plating

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2401-2404

  Yoshida, Nobuyuki ^a   Tasaki, Toshikazu ^a   Chang, Tso Fu Mark ^a   Shibata, Akinobu ^a   Ishiyama, Chiemi ^a   Sone, Masato ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Electroless alloy plating; Metallic glass; Nanostructure; Patterning

Indexed keywords

ALLOY PLATING; CATALYST CORES; CONTROL NANOSTRUCTURES; ELECTROLESS; IMMERSION TIME; PATTERNING; PD CATALYST; PD-NI-P;

ALLOYS; CATALYSTS; GLASS; METALLIC GLASS; NANOSTRUCTURES;

CERIUM ALLOYS;

EID: 79960073255     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.081     Document Type: Conference Paper

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