PDMS microcantilever-based flow sensor integration for lab-on-a-chip

IEEE Sensors Journal

Volumn 13, Issue 2, 2013, Pages 601-609

  Nezhad, Amir Sanati ^a   Ghanbari, Mahmood ^a   Agudelo, Carlos G ^a   Packirisamy, Muthukumaran ^a   Bhat, Rama B ^a   Geitmann, Anja ^b  

^a Gina Cody School of Engineering and Computer Science   (Canada)

^b UNIVERSITÉ DE MONTRÉAL   (Canada)

Author keywords

Flow sensor; lab on a chip; multilayer soft lithography; polydimethylsiloxane (PDMS) microcantilever

Indexed keywords

3D-FINITE ELEMENT ANALYSIS; CANTILEVER DEFLECTION; DYNAMIC RANGE; EXPERIMENTAL METHODS; FABRICATION TECHNIQUE; FLOW CONDITION; FLOW-SENSORS; HIGH ASPECT RATIO; LAB-ON-A-CHIP; MICRO-CANTILEVERS; MICRO-FLOW; MICRO-FLUIDIC DEVICES; MULTILAYER SOFT LITHOGRAPHY; PARTICLE SEPARATION; POLYDIMETHYLSILOXANE PDMS; PRACTICAL METHOD; THIN LAYERS; THREE-LAYER;

ASPECT RATIO; AUTOMOBILE MANUFACTURE; COMPOSITE MICROMECHANICS; FINITE ELEMENT METHOD; FLOW CYTOMETRY; FLOW MEASUREMENT; FLOW RATE; LITHOGRAPHY; MICROCHANNELS; MICROFLUIDICS; MULTILAYERS; SENSORS;

SILICONES;

EID: 84872283985     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2012.2223667     Document Type: Article

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