Non-wetted thermal micro flow sensor

Proceedings of the SICE Annual Conference

Volumn , Issue , 2007, Pages 2084-2088

  Terao, Minako ^a   Akutsu, Tomomi ^a   Tanaka, Yoshiaki ^a  

^a YOKOGAWA ELECTRIC CORPORATION   (Japan)

Author keywords

Liquid flow; MEMS; Micro flow sensor; Micro plant; Microreactor; Thermal flow sensor

Indexed keywords

COMPUTER SIMULATION; MAGNETOELECTRIC EFFECTS; SENSORS; WETTING;

ANNUAL CONFERENCE; APPLICATIONS.; CONTROL ENGINEERS; EXPERIMENTAL EVALUATIONS; FEM ANALYSIS; FLOW-RATE; HIGH RESISTANCE; LIQUID FLOW; MEASUREMENT ACCURACY; MEMS; MEMS PROCESS; MICRO FLOW SENSOR; MICRO FLOWS; MICRO PLANT; MICRO REACTORS; MICRO-LIQUID; MICROREACTOR; NON-WETTED; NUMERICAL SIMULATIONS; PERFORMANCE RESULTS; PLANT APPLICATIONS; SENSING ELEMENTS; THERMAL FLOW SENSOR; WETTED SURFACE; ZERO DRIFT;

FLOW SIMULATION;

EID: 50249172927     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SICE.2007.4421331     Document Type: Conference Paper

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