Sculptured thin films as 3D photonic crystals

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8465, Issue , 2012, Pages

  Venugopal, Vijayakumar C ^a  

^a Fiat Lux Technologies   (United States)

Author keywords

3D photonic crystals; Circular Bragg phenomenon; Inhomogeneous continuum; Lithography; Process control; Sculptured thin films; Structural chirality; Thin film deposition

Indexed keywords

3D PHOTONIC CRYSTALS; CIRCULAR BRAGG PHENOMENA; INHOMOGENEOUS CONTINUUM; SCULPTURED THIN FILMS; STRUCTURAL CHIRALITY; THIN-FILM DEPOSITIONS;

CHIRALITY; ENANTIOMERS; LITHOGRAPHY; OPTICS; PHOTONIC CRYSTALS; PROCESS CONTROL; PROCESS MONITORING; THIN FILMS; THREE DIMENSIONAL COMPUTER GRAPHICS; WAVEGUIDE FILTERS;

VAPOR DEPOSITION;

EID: 84872134288     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.929335     Document Type: Conference Paper

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