Terahertz time-domain spectroscopic ellipsometry: Instrumentation and calibration

Optics Express

Volumn 20, Issue 27, 2012, Pages 29063-29075

  Neshat, Mohammad ^a   Armitage, N P ^a  

^a JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; GEOMETRY; MICROWAVE ANTENNAS; PHOSPHORUS; PHOTONIC BAND GAP; SILICON; SPECTROSCOPIC ELLIPSOMETRY;

ANGLE OF INCIDENCE; ARBITRARY ANGLES; CALIBRATION PROCEDURE; CHARACTERIZATION TECHNIQUES; ELLIPSOMETERS; ELLIPSOMETRIC PARAMETERS; HIGH-RESISTIVITY SILICON SUBSTRATE; HOLLOW-CORE PHOTONIC BAND-GAP FIBERS; NONIDEALITY; PHOSPHORUS CONCENTRATION; PHOTOCONDUCTIVE ANTENNAS; POLARIZATION RESPONSE; PROOF OF PRINCIPLES; REFLECTION GEOMETRY; REGRESSION ALGORITHMS; REGRESSION CALIBRATION METHODS; SI SUBSTRATES; TERA HERTZ; THERMAL OXIDES; TIME DOMAIN; TRANSMISSION GEOMETRIES; WIRE GRID POLARIZERS;

TIME DOMAIN ANALYSIS;

ALGORITHM; ARTICLE; CALIBRATION; EQUIPMENT; EQUIPMENT FAILURE; METHODOLOGY; STANDARD; TERAHERTZ SPECTROSCOPY;

ALGORITHMS; CALIBRATION; EQUIPMENT FAILURE ANALYSIS; TERAHERTZ SPECTROSCOPY;

EID: 84872020026     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.029063     Document Type: Article

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