A miniaturized chemocapacitor system for the detection of volatile organic compounds

Sensors and Actuators, B: Chemical

Volumn 177, Issue , 2013, Pages 776-784

  Botsialas, A ^a,b   Oikonomou, P ^a   Goustouridis, D ^c   Ganetsos, Th ^d   Raptis, I ^a,b   Sanopoulou, M ^a  

^a Institute of Advanced Materials Physicochemical Processes Nanotechnology and Microsystems   (Greece)

^b ThetaMetrisis SA   (Greece)

^c UNIVERSITY OF WEST ATTICA   (Greece)

^d Technological and Educational Institute TEI of Lamia   (Greece)

Author keywords

Chemocapacitor; Hybrid gas sensing system; Interdigitated electrodes; Volatile organic compounds

Indexed keywords

ANALOG MULTIPLEXER; ARRAY ELEMENTS; CAPACITANCE SIGNAL; CHEMOCAPACITOR; CRITICAL DIMENSION; GAS SENSING; HEALTH STANDARDS; INTER-DIGITATED ELECTRODES; LOW CONCENTRATIONS; LOW POWER; P-XYLENE; READOUT ELECTRONICS; REAL-LIFE APPLICATIONS;

CAPACITANCE; CHEMICAL DETECTION; GAS DETECTORS; MICROELECTRONICS; SENSORS; TOLUENE; XYLENE;

VOLATILE ORGANIC COMPOUNDS;

EID: 84871802069     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.11.050     Document Type: Article

References (28)

1. A.M. Kummer, and A. Hierlemann Configurable electrodes for capacitive-type sensors and chemical sensors IEEE Sensors Journal 6 2006 3 10 (Pubitemid 43131688)
2. C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand, and H. Baltes Smart single-chip gas sensor microsystems Nature 414 2001 293 296 (Pubitemid 33097802)
3. R. Zhou, A. Hierlemann, U. Weimar, and W. Göpel Gravimetric, dielectric and calorimetric methods for the detection of organic solvent vapours using poly(ether urethane) coatings Sensors and Actuators B 34 1996 356 360 (Pubitemid 126379887)
4. Y. Li, C. Vancura, D. Barrettino, M. Graf, C. Hagleitner, A. Kummer, M. Zimmermann, K.-U. Kirstein, and A. Hierlemann Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes Sensors and Actuators B 126 2007 431 440 (Pubitemid 47407804)
5. P. Kurzawski, C. Hagleitner, and A. Hierlemann Detection and discrimination capabilities of a multitransducer single-chip gas sensor system Analytical Chemistry 78 2006 6910 6920 (Pubitemid 44522543)
6. P. Kanitkar, M. Kaur, S. Sen, A. Joshi, V. Kumar, S.K. Gupta, and J.V. Yakhmi International Journal of Nanotechnology 7 2010 883 906
7. J.W. Gardner, P.K. Guha, F. Udrea, and J.A. Covington CMOS interfacing for integrated gas sensors: a review IEEE Sensors Journal 10 2010 1833 1848
8. W. Hu, R. Anderson, Y. Qian, J. Song, J. Wook Noh, S. Kim, and G.P. Nordin Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method Review of Scientific Instruments 80 2009 085101
9. A.D.G. del Mauro, V. La Ferrara, E. Massera, M.L. Lucia, T. Polichetti, G.a. Rametta, and G. Di Francia A study of the swelling properties of polymer nanocomposites through electrical and optical characterization Macromolecular Symposia 286 2009 203 207
10. D.L. McCorkle, R.J. Warmack, and S.V. Patel Ethanol vapor detection in aqueous environments using micro-capacitors and dielectric polymers Sensors and Actuators B 107 2005 892 903
11. S.V. Patel, T.E. Mlsna, B. Fruhberger, E. Klaassen, S. Cemalovic, and D.R. Baselt Chemicapacitive microsensors for volatile organic compound detection Sensors and Actuators B 96 2003 541 553
12. K. Manoli, D. Goustouridis, I. Raptis, E. Valamontes, and M. Sanopoulou Vapor-induced swelling of supported methacrylic and siloxane polymer films: determination of interaction parameters Journal of Applied Polymer Science 116 2010 184 190
13. K. Manoli, D. Goustouridis, S. Chatzandroulis, I. Raptis, E. Valamontes, and M. Sanopoulou Vapor sorption in thin supported polymer films studied by white light interferometry Polymer 47 2006 6117 6122 (Pubitemid 44109880)
14. R. Igreja, and C.J. Dias Extension to the analytical model of the interdigital electrodes capacitance for a multi-layered structure Sensors and Actuators A 172 2011 392 399
15. 3 nanocomposites based chemocapacitive sensors Microelectronic Engineering 86 2009 1286 1288
16. T. Blecha Detection of gases and vapours concentration from resonance curve of interdigital system ISSE 2009 5207060
17. P. Oikonomou, G.P. Patsis, A. Botsialas, K. Manoli, D. Goustouridis, N.A. Pantazis, A. Kavadias, E. Valamontes, Th. Ganetsos, M. Sanopoulou, and I. Raptis Performance simulation, realization and evaluation of capacitive sensor arrays for the real time detection of volatile organic compounds Microelectronic Engineering 88 2011 2359 2363
18. R. Igreja, and C.J. Dias Analytical evaluation of the interdigital electrodes capacitance for a multi-layered structure Sensors and Actuators A 112 2004 291 301
19. P. Oikonomou, A. Botsialas, D. Goustouridis, E. Valamontes, M. Sanopoulou, and I. Raptis Compensation of temperature effect in chemocapacitive sensor array system for gas sensing applications Sensor Letters 10 2012 717 723
20. A. Oprea, N. Barsan, U. Weimar, M.-L. Bauersfeld, D. Ebling, and J. Wollenstein Capacitive humidity sensors on flexible RFID labels Sensors and Actuators B 132 2008 404 410
21. T.E. Mlsna, S. Cemalovic, and S.V. Patel Chemicapacitive microsensors for chemical detection S. Marco, I. Montoliu, Proceedings of the 11th International Symposium on Olfaction and Electronic Nose-'ISOEN' 2005 Barcelona, Spain, 13-15 April 2005 326 329
22. M. Kitsara, D. Goustouridis, S. Chatzandroulis, M. Chatzichristidi, I. Raptis, Ganetsos Th., R. Igreja, and C.J. Dias Single chip interdigitated electrode capacitive chemical sensor arrays Sensors and Actuators B: Chemical 127 2007 186 192 (Pubitemid 47503722)
23. P. Oikonomou, A. Botsialas, K. Manoli, D. Goustouridis, E. Valamontes, M. Sanopoulou, I. Raptis, and G.P. Patsis Chemocapacitor performance modeling by means of polymer swelling optical measurements Sensors and Actuators B 171-172 2012 409 415
24. http://www.analog.com/static/imported-files/data-sheets/AD7745-7746.pdf
25. M. Kitsara, K. Beltsios, D. Goustouridis, S. Chatzandroulis, and I. Raptis Sequential polymer lithography for chemical sensor arrays European Polymer Journal 43 2007 4602 4612 (Pubitemid 350011094)
26. J. Nath, and S.S. Das Dielectric behavior of binary and ternary liquid mixtures of some weakly interacting components at 30 °C Indian Journal of Pure and Applied Physics 19 1981 343 346
27. D.K. Burghate, V.P. Akhare, and V.S. Deogaonkar Dielectric behavior and charge transfer complexation in ternary liquid mixtures Indian Journal of Physics 69A 1995 381 386
28. http://www.osha.gov