Sequential polymer lithography for chemical sensor arrays

European Polymer Journal

Volumn 43, Issue 11, 2007, Pages 4602-4612

  Kitsara, Maria ^a,b   Beltsios, Konstantinos ^b   Goustouridis, Dimitrios ^a   Chatzandroulis, Stavros ^a   Raptis, Ioannis ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b UNIVERSITY OF IOANNINA   (Greece)

Author keywords

Chemical sensors; Photolithography; Polymer deposition; Polymer swelling; Vapor sorption

Indexed keywords

POLYMER DEPOSITION; POLYMER SWELLING; VAPOR SORPTION; VOLUME EXPANSION;

EMISSION SPECTROSCOPY; LIGHT REFLECTION; ORGANIC POLYMERS; PHOTOLITHOGRAPHY; POLYMER FILMS; SWELLING;

CHEMICAL SENSORS;

EID: 35548995839     PISSN: 00143057     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.eurpolymj.2007.07.034     Document Type: Article

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