Deposition of high-efficiency microcrystalline silicon solar cells using SiF 4/H2ar mixtures

IEEE Journal of Photovoltaics

Volumn 3, Issue 1, 2013, Pages 581-586

  Dornstetter, Jean Christophe ^a,b   Kasouit, Samir ^a   Rocai Cabarrocas, Pere ^b  

^a TOTAL   (France)

^b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Microcrystalline silicon; silicon tetrafluoride; solar cells; thin films

Indexed keywords

AMORPHOUS PHASE; COLUMN BOUNDARIES; CRYSTALLOGRAPHIC ORIENTATIONS; FILM DEPOSITION; GROWTH MECHANISMS; POLYCRYSTALLINE CELLS; SILICON TETRAFLUORIDE; STRUCTURAL CHARACTERIZATION;

AMORPHOUS MATERIALS; CRYSTALLINE MATERIALS; DEPOSITS; FILM GROWTH; MICROCRYSTALLINE SILICON; SILICON COMPOUNDS; SOLAR CELLS; THIN FILMS;

SILICON SOLAR CELLS;

EID: 84871791256     PISSN: 21563381     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPHOTOV.2012.2221683     Document Type: Article

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