A simultaneous multiple angle-wavelength dispersive X-ray reflectometer using a bent-twisted polychromator crystal

Journal of Synchrotron Radiation

Volumn 20, Issue 1, 2013, Pages 80-88

  Matsushita, Tadashi ^a   Arakawa, Etsuo ^b   Voegeli, Wolfgang ^a   Yano, Yohko F ^c  

^a INSTITUTE OF MATERIALS STRUCTURE SCIENCE   (Japan)

^b TOKYO GAKUGEI UNIVERSITY   (Japan)

^c KINKI UNIVERSITY   (Japan)

Author keywords

bent twisted polychromator crystal; simultaneous measurement; time resolved measurement; X ray reflectivity curve

Indexed keywords

CONVERGENT BEAMS; DATA COLLECTION; ELECTRON STORAGE RING; GLANCING ANGLE; INTENSITY DISTRIBUTION; MONOCHROMATOR CRYSTALS; PILATUS; PIXEL ARRAYS; POLYCHROMATORS; REFLECTED BEAM; REFLECTIVITY CURVE; SAMPLE SURFACE; SILICON (100); SIMULTANEOUS MEASUREMENT; SINGLE-CRYSTAL SUBSTRATES; SPECULAR X-RAY REFLECTIVITIES; STRUCTURAL CHANGE; THIN GOLD FILM; TIME RESOLVED MEASUREMENT; TIME-RESOLVED; TYPICAL VALUES; VERTICAL DIRECTION; X RAY BEAM; X RAY REFLECTIVITY; X-RAY STUDIES;

DIELECTRIC MATERIALS; ETHYLENE GLYCOL; REFLECTOMETERS; SILICON; SILICON WAFERS; X RAY OPTICS;

X RAYS;

EID: 84871413970     PISSN: 09090495     EISSN: 16005775     Source Type: Journal    
DOI: 10.1107/S0909049512043415     Document Type: Article

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