High-speed x-ray reflectometory in multiwavelength-dispersive mode

Applied Physics Letters

Volumn 92, Issue 2, 2008, Pages

  Matsushita, Tadashi ^a   Niwa, Yasuhiro ^a   Inada, Yasuhiro ^a   Nomura, Masaharu ^a   Ishii, Masashi ^b   Sakurai, Kenji ^b   Arakawa, Etsuo ^c  

^a INSTITUTE OF MATERIALS STRUCTURE SCIENCE   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^c TOKYO GAKUGEI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON; THIN FILMS; X RAY ANALYSIS;

ANGLE SCAN; MULTIWAVELENGTH-DISPERSIVE MODE; POLYCHROMATOR;

CRYSTAL STRUCTURE;

EID: 38349191648     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2833690     Document Type: Article

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