Fabrication of a micro humidity sensor with polypyrrole using the CMOS process

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Volumn , Issue , 2010, Pages 110-113

  Dai, Ching Liang ^a   Lu, De Hao ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

CMOS; Humidity sensor; Polypyrrole

Indexed keywords

CAPACITANCE VARIATION; CAPACITIVE TYPE; CHEMICAL POLYMERIZATION; CMOS; CMOS PROCESSS; COMPLIMENTARY METAL OXIDE SEMICONDUCTORS; HIGH SENSITIVITY; INTERDIGITAL ELECTRODE; OSCILLATION FREQUENCY; POST-CMOS; RING OSCILLATOR CIRCUITS; SACRIFICIAL LAYER; SENSITIVE FILMS;

CAPACITANCE; CMOS INTEGRATED CIRCUITS; FIBER OPTIC SENSORS; METALLIC COMPOUNDS; MOS DEVICES; OSCILLATORS (ELECTRONIC); POLYPYRROLES; WET ETCHING;

HUMIDITY SENSORS;

EID: 78649238146     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2010.5592158     Document Type: Conference Paper

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