A 3D implantable microsystem for intraocular pressure monitoring using a glass-in-silicon reflow process

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 995-998

  Haque, R M ^a   Wise, K D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS CIRCUITS; GLASS PACKAGES; HAPTICS; IMPLANTABLE MICROSYSTEMS; INTRA OCULAR PRESSURE; OPTICAL TRIGGERS; POWER CONSUMPTION; REFLOW PROCESS; TISSUE DAMAGE; VERTICAL FEEDTHROUGHS;

CMOS INTEGRATED CIRCUITS; ENERGY HARVESTING; MECHANICAL ENGINEERING; MECHANICS; MEMS; MICROSYSTEMS; REACTIVE ION ETCHING; SOLAR ENERGY;

GLASS;

EID: 79953794402     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734595     Document Type: Conference Paper

References (4)

1. R. M. Haque and K. D. Wise, "An Intraocular Pressure Sensor Based on a Glass Reflow Process", Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, June 2010, pp.49-52.
2. P. J. Chen, S. Saati, R. Varma, M. S. Humayun, Y-C Tai, "Wireless Intraocular Pressure Sensing using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant", J. Microelectromechanical Systems, v. 19, pp. 721-734, 2010
3. K. Stangel, S. Kolnsberg, D. Hammerschmidt, B. J. Hosticka, H. K. Trieu, and W. Mokwa, "A Programmable Intraocular CMOS Pressure Sensor System Implant," IEEE J. Solid-St. Circuits, 36, pp. 1094-1100, July 2001. (Pubitemid 32732796)
4. G. Chen, H. Ghaed, R. M. Haque, M. Wieckowski, Y. Kim, G. Kim, D. Fick, D. Kim, M. Seok, K. D. Wise, D. Blaauw, D. Sylvester, "A Cubic-Millimeter Energy-Autonomous Wireless Intraocular Pressure Monitor" ISSCC Dig. Tech. Papers, February 2011.