Implantable micromechanical parylene-based pressure sensors for unpowered intraocular pressure sensing

Journal of Micromechanics and Microengineering

Volumn 17, Issue 10, 2007, Pages 1931-1938

  Chen, Po Jui ^a   Rodger, Damien C ^b,c   Agrawal, Rajat ^c,d   Saati, Saloomeh ^d   Meng, Ellis ^e   Varma, Rohit ^c,d   Humayun, Mark S ^c,d   Tai, Yu Chong ^a,b  

^a California Institute of Technology   (United States)

^b California Institute of Technology   (United States)

^c UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

^d DOHENY EYE INSTITUTE   (United States)

^e NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BIOCOMPATIBILITY; DEFORMATION; ELECTRONICS PACKAGING; ION IMPLANTATION; MEMS;

MECHANICAL DEFORMATION; PARYLENE; PRESSURE VARIATIONS; SPIRAL-TUBE STRUCTURES;

PRESSURE SENSORS;

EID: 34748899651     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/10/002     Document Type: Article

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