Highly selective chemical vapor deposition of tin diselenide thin films onto patterned substrates via single source diselenoether precursors

Chemistry of Materials

Volumn 24, Issue 22, 2012, Pages 4442-4449

  De Groot, C H ^a   Gurnani, Chitra ^a   Hector, Andrew L ^a   Huang, Ruomeng ^a   Jura, Marek ^b   Levason, William ^a   Reid, Gillian ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

chemical vapor deposition; selective deposition; selenoether complexes; single source precursor; tin diselenide

Indexed keywords

BIDENTATE LIGANDS; CRYSTAL PLATES; CRYSTALLINE FILMS; DEPOSITED FILMS; HALL MEASUREMENTS; HEXAGONAL PLATES; HIGH SELECTIVITY; N-TYPE SEMICONDUCTORS; OCTAHEDRAL COMPLEX; PATTERNED SUBSTRATES; PREFERRED ORIENTATIONS; SELECTIVE DEPOSITION; SELENOETHER COMPLEXES; SINGLE PHASE; SINGLE SOURCE; SINGLE-SOURCE PRECURSOR; SUBSTRATE SURFACE; WATER DROPLETS;

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CONTACT ANGLE; CRYSTALLITES; DEPOSITS; FILM GROWTH; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SELENIUM COMPOUNDS; SEMICONDUCTING SELENIUM COMPOUNDS; TIN; TITANIUM NITRIDE; VAPORS; X RAY CRYSTALLOGRAPHY; X RAY DIFFRACTION;

SUBSTRATES;

EID: 84870175781     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm302864x     Document Type: Article

References (54)

1. Malik, M. A.; Afzaal, M.; O'Brien, P. Chem. Rev. 2010, 110, 4417
2. Wang, W.; Poudel, B.; Yang, J.; Wang, D. Z.; Ren, J. F. J. Am. Chem. Soc. 2005, 127, 13792
3. Christian, P.; O'Brien, P. J. Mater. Chem. 2005, 15, 4949
4. Xia, Y.; Qian, D.; Hsieh, D.; Wray, L.; Pal, A.; Lin, H.; Bansil, A.; Grauer, D.; Hor, Y. S.; Cava, J.; Hasan, M. Z. Nat. Phys. 2009, 5, 398
5. Gabane, J. P. Lithium Batteries; Academic Press: London, U.K., 1983
6. Whittingham, M. S. Chem. Rev. 2004, 104, 4271, and references therein
7. Raoux, S.; Wełnic, W.; Ielmini, D. Chem. Rev. 2010, 110, 240
8. Liu, S.; Guo, X.; Li, M.; Zhang, W.-H.; Lui, X.; Li, A. Angew. Chem., Int. Ed. 2011, 50, 12050
9. Bindu, K.; Nair, P. K. Semicond. Sci. Technol. 2004, 19, 1348
10. Achimovičová, M.; da Silva, K. L.; Daneu, N.; Rečnik, A.; Indris, S.; Hain, H.; Scheuermann, M.; Hahn, H.; Šepelák, V. J. Mater. Chem. 2011, 21, 5873
11. Wang, R. Y.; Caldwell, M. A.; Jeyasingh, R. G. D.; Aloni, S.; Shelby, R. M.; Wong, H.-S. P.; Milliron, D. J. J. Appl. Phys. 2011, 109, 113506
12. Chung, K.-M.; Wamwangi, D.; Woda, M.; Wuttig, M.; Bensch, W. J. Appl. Phys. 2008, 103, 083523
13. Mitzi, D. B. Inorg. Chem. 2005, 44, 3755
14. Arnold, J. Prog. Inorg. Chem. 1995, 43, 353 and references therein
15. Hector, A. L.; Levason, W.; Reid, G.; Reid, S. D.; Webster, M. Chem. Mater. 2008, 20, 5100
16. Hector, A. L.; Jura, M.; Levason, W.; Reid, S. D.; Reid, G. New. J. Chem. 2009, 33, 641
17. Levason, W.; Reid, G. J. Chem. Soc., Dalton Trans. 2001, 2953
18. Levason, W.; Reid, G.; Zhang, W. Dalton Trans. 2011, 40, 8491
19. Levason, W.; Patel, B.; Reid, G.; Tolhurst, V.-A.; Webster, M. J. Chem. Soc., Dalton Trans. 2000, 3001
20. Hart, R.; Levason, W.; Patel, B.; Reid, G. J. Chem. Soc., Dalton Trans. 2002, 3153
21. Hector, A. L.; Levason, W.; Middleton, A. J.; Reid, G.; Webster, M. Eur. J. Inorg. Chem. 2007, 3655
22. Jura, M.; Levason, W.; Ratnani, R.; Reid, G.; Webster, M. Dalton Trans. 2010, 883
23. Benjamin, S. L.; Hyslop, A.; Levason, W.; Reid, G. J. Fluorine Chem. 2012, 137, 77
24. Dann, S. E.; Genge, A. R. J.; Levason, W.; Reid, G. J. Chem. Soc., Dalton Trans. 1997, 2207
25. Levason, W.; Reid, G. In Comprehensive Coordination Chemistry II; McCleverty, J. A.; Meyer, T. J., Eds.; Elsevier: Amsterdam, The Netherlands, 2004; Vol. 1, p 391.
26. Levason, W.; Reid, G. Handbook of Chalcogen Chemistry; Devillanova, F. A., Ed.; Royal Society of Chemistry: Cambridge, U.K., 2007; p 81.
27. Hope, E. G.; Levason, W. Coord. Chem. Rev. 1993, 122, 109
28. Levason, W.; Orchard, S. D.; Reid, G. Coord. Chem. Rev. 2002, 225, 159
29. Boscher, N. D.; Carmalt, C. J.; Palgrave, R. G.; Parkin, I. P. Thin Solid Films 2008, 516, 4750
30. Boscher, N. D.; Carmalt, C. J.; Parkin, I. P. Appl. Surf. Sci. 2010, 256, 3178
31. Boscher, N. D.; Blackman, C. S.; Carmalt, C. J.; Parkin, I. P.; Garcia Prieto, A. Appl. Surf. Sci. 2007, 253, 6041
32. Boscher, N. D.; Carmalt, C. J.; Parkin, I. P. Eur. J. Inorg. Chem. 2006, 1255
33. McKarns, P. J.; Lewkebandara, T. S.; Yap, G. P. A.; Liable-Sands, L. M.; Rheingold, A. L.; Winter, C. H. Inorg. Chem. 1998, 37, 418
34. Reid, S. D.; Hector, A. L.; Levason, W.; Reid, G.; Waller, B. J.; Webster, M. Dalton Trans. 2007, 4769
35. Edusi, C.; Hyett, G.; Sankar, G.; Parkin, I. P. Chem. Vap. Deposition 2011, 17, 30
36. Carmalt, C. J.; Parkin, I. P.; Peters, E. S. Polyhedron 2003, 22, 1263
37. Choi, B. H.; Park, C. M.; Song, S.-H.; Son, M. H.; Hwang, S. W.; Ahn, D.; Kim, E. K. Appl. Phys. Lett. 2001, 78, 1403
38. Choi, B. J.; Choi, S.; Shin, Y. C.; Kim, K. M.; Hwang, C. S.; Kim, Y. J.; Son, Y. J.; Hong, S. K. Chem. Mater. 2007, 19, 4387
39. Eom, T.; Choi, S.; Choi, B. J.; Lee, M. H.; Gwon, T.; Rha, S. H.; Lee, W.; Kim, M.-S.; Xiao, M.; Buchanan, I.; Cho, D.-Y.; Hwang, C. S. Chem. Mater. 2012, 24, 2099
40. Sheldrick, G. M. SHELXS-97, Program for crystal structure solution; University of Göttingen: Göttingen, Germany, 1997.
41. Sheldrick, G. M. SHELXL-97, Program for crystal structure refinement; University of Göttingen: Göttingen, Germany, 1997.
42. Larson, A. C.; von Dreele, R. B. General Structure Analysis System (GSAS). Los Alamos National Laboratory Report LAUR 86-748; Los Alamos National Laboratory: Los Alamos, NM, 2000.
43. Toby, B. H. J. Appl. Crystallogr. 2001, 34, 210
44. Liu, H.; Chang, L. Y. J. Alloys Compd. 1992, 185, 183
45. Karim, S.; Toimil-Molares, M. E.; Maurer, F.; Miehe, G.; Ensinger, W.; Liu, J.; Cornelius, T. W.; Neumann, R. Appl. Phys. A: Mater. Sci. Process. 2006, 84, 403
46. Dann, S. E.; Genge, A. R. J.; Levason, W.; Reid, G. J. Chem. Soc., Dalton Trans. 1996, 4471
47. Genge, A. R. J.; Levason, W.; Reid, G. J. Chem. Soc., Dalton Trans. 1997, 4549
48. Davis, M. F.; Levason, W.; Reid, G.; Webster, M.; Zhang, W. Dalton Trans. 2008, 533
49. Inorganic Crystal Structure Database (ICSD) Fachinformationszentrum Karlsruhe (FIZ), accessed via the United Kingdom Chemical Database Service: Fletcher, D. A.; McMeeking, R. F.; Parkin, D. J. Chem. Inf. Comput. Sci. 1996, 36, 746
50. Walsh, D.; Jandl, S.; Harbec, J. Y. J. Phys. C: Solid State Phys. 1980, 13, L125
51. Smith, A. J.; Meek, P. E.; Liang, W. Y. J. Phys. C: Solid State Phys. 1977, 10, 1321
52. Schlaf, R.; Louder, D.; Lang, O.; Pettenkofer, C.; Jaegermann, W.; Nebesny, K. W.; Lee, P. A.; Parkinson, B. A.; Armstrong, N. R. J. Vac. Sci. Technol., A 1995, 13, 1761
53. Njoroge, W.; Wöltgens, H.-W.; Wuttig, M. J. Vac. Sci. Technol., A 2002, 20, 230
54. Gladfelter, W. L. Chem. Mater. 1993, 5, 1372