Evaluation of group 4 metal bis-cyclopentadienyl complexes with selenolate and tellurolate ligands for CVD of ME2 Films (E = Se or Te)

Chemistry of Materials

Volumn 20, Issue 15, 2008, Pages 5100-5106

  Hector, Andrew L ^a   Levason, William ^a   Reid, Gillian ^a   Reid, Stuart D ^a   Webster, Michael ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; METALS;

CYCLOPENTADIENYL COMPLEXES; GROUP 4;

CHLORINE COMPOUNDS;

EID: 50249146348     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm800802g     Document Type: Article

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