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Volumn 22, Issue 9, 2003, Pages 1263-1269
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Atmospheric pressure chemical vapour deposition of TiS2 thin films on glass
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Author keywords
Atmospheric pressure chemical vapour deposition; Energy dispersive X ray analysis; TiS2
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Indexed keywords
AMORPHOUS FILMS;
ATMOSPHERIC CHEMISTRY;
ATMOSPHERIC PRESSURE;
CHEMICAL VAPOR DEPOSITION;
CHLORINE COMPOUNDS;
GLASS;
GLASS SUBSTRATES;
METAL SUBSTRATES;
NANOCRYSTALS;
SCANNING ELECTRON MICROSCOPY;
SILICON COMPOUNDS;
THIN FILMS;
TITANIUM COMPOUNDS;
X RAY DIFFRACTION ANALYSIS;
ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION;
CELL CONSTANT;
ENERGY DISPERSIVE ANALYSIS;
GLASS SUBSTRATES;
HIGHLY REFLECTIVE;
NANOCRYSTALLINES;
S RATIO;
SUBSTRATES TEMPERATURE;
THIN-FILMS;
X-RAY AMORPHOUS;
ENERGY DISPERSIVE X RAY ANALYSIS;
GLASS;
SULFIDE;
TITANIUM;
ARTICLE;
ATMOSPHERIC PRESSURE;
CHEMICAL STRUCTURE;
CRYSTAL STRUCTURE;
FILM;
RAMAN SPECTROMETRY;
REACTION ANALYSIS;
SCANNING ELECTRON MICROSCOPY;
STRUCTURE ANALYSIS;
TEMPERATURE DEPENDENCE;
X RAY CRYSTALLOGRAPHY;
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EID: 0038066905
PISSN: 02775387
EISSN: None
Source Type: Journal
DOI: 10.1016/S0277-5387(03)00067-6 Document Type: Article |
Times cited : (29)
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References (22)
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