Screen-printed piezoceramic thick films for miniaturised devices

Journal of Electroceramics

Volumn 19, Issue 4, 2007, Pages 333-338

  Lou Moeller, R ^a   Hindrichsen, C C ^b   Thamdrup, L H ^b   Bove, T ^c   Ringgaard, E ^a   Pedersen, A F ^c   Thomsen, E V ^b  

^a Ferroperm Piezoceramics A/S   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c InSensor AS   (Denmark)

Author keywords

MEMS; Piezoceramic; PZT; Thick film

Indexed keywords

ELECTRODES; FINITE ELEMENT METHOD; PIEZOELECTRIC DEVICES; THICK FILMS;

INTEGRATED DEVICES; MEMS ACCELEROMETERS; MINIATURISED DEVICES; PIEZOCERAMIC THICK FILMS;

MEMS;

EID: 37249070363     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-007-9055-0     Document Type: Article

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