Plasma Sheath Structures in Complex Electrode Geometries

Contributions to Plasma Physics

Volumn 52, Issue 10, 2012, Pages 827-835

  Schubert, G ^a,c   Haass, M ^b,d   Trottenberg, T ^b   Fehske, H ^a   Kersten, H ^b  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b UNIVERSITY OF KIEL   (Germany)

^c PHILIPS HEALTHCARE   (United States)

^d CEA GRENOBLE   (France)

Author keywords

Particle diagnostics; Particle trapping; Plasma sheath; Vertical wall

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; PLASMA SIMULATION;

COMPLEX ELECTRODE; CONDUCTIVE WALLS; DIELECTRIC WALLS; ELECTRODE GEOMETRIES; MICRO PARTICLES; PARTICLE DIAGNOSTICS; PARTICLE TRAPPING; RF ELECTRODES; SHEATH STRUCTURES; VERTICAL WALL;

PLASMA SHEATHS;

EID: 84869072709     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.201200039     Document Type: Article

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