Mass Spectrometric Investigations of Nano-Size Cluster Ions Produced by High Pressure Magnetron Sputtering

Contributions to Plasma Physics

Volumn 52, Issue 10, 2012, Pages 881-889

  Ganeva, M ^a   Peter, T ^b   Bornholdt, S ^b   Kersten, H ^b   Strunskus, T ^b   Zaporojtchenko, V ^b   Faupel, F ^b   Hippler, R ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b UNIVERSITY OF KIEL   (Germany)

Author keywords

Ag cluster films; Ag nanoparticles; Magnetron sputtering; Quadrupole mass filter; TEM

Indexed keywords

BANDPASS FILTERS; CLUSTER ANALYSIS; FLOW OF GASES; MAGNETRON SPUTTERING; MASS SPECTROMETERS; MASS SPECTROMETRY; METAL NANOPARTICLES; NANOCLUSTERS; SIZE DISTRIBUTION;

AG CLUSTER FILM; AG CLUSTERS; CLUSTER FILMS; CLUSTER IONS; MAGNETRON-SPUTTERING; NANO CLUSTERS; NANO-SIZE; QUADRUPOLE MASS FILTERS; TRANSMISSION ELECTRON; TRANSMISSION ELECTRON MICROSCOPIC;

SILVER NANOPARTICLES;

EID: 84869044374     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.201200046     Document Type: Article

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