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Volumn 14, Issue 23, 2012, Pages 7929-7933
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Investigation of Al-doped silicon nitride-based semiconductor and its shrinkage mechanism
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 84868515215
PISSN: None
EISSN: 14668033
Source Type: Journal
DOI: 10.1039/c2ce25758k Document Type: Article |
Times cited : (12)
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References (24)
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