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Volumn 14, Issue 23, 2012, Pages 7929-7933

Investigation of Al-doped silicon nitride-based semiconductor and its shrinkage mechanism

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[No Author keywords available]

Indexed keywords


EID: 84868515215     PISSN: None     EISSN: 14668033     Source Type: Journal    
DOI: 10.1039/c2ce25758k     Document Type: Article
Times cited : (12)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.