Surface modification of DLC film due to oxygen-plasma exposure, observed by IR absorption spectroscopy in multiple-internal-reflection geometry

IEEE Transactions on Plasma Science

Volumn 40, Issue 10 PART 2, 2012, Pages 2756-2761

  Shinohara, Masanori ^a   Takaki, Yu Ya ^a   Takami, Yoshiki ^a   Matuda, Yoshinobu ^a   Fujiyama, Hiroshi ^a  

^a NAGASAKI UNIVERSITY   (Japan)

Author keywords

Diamond like carbon (DLC); Infrared (IR) spectroscopy; Oxidation; Oxygen plasma

Indexed keywords

C-H BOND; DIAMOND-LIKE CARBON; DIFFERENT SUBSTRATES; DLC FILM; HYDROGEN ABSTRACTION; HYDROGEN CONTENTS; INFRARED SPECTRAL; IR ABSORPTION SPECTROSCOPY; OH FORMATION; OH GROUP; OXYGEN PLASMAS; PLASMA EXPOSURE; SUBSTRATE TEMPERATURE;

CARBON FILMS; HYDROGEN; HYDROGEN BONDS; OXIDATION; PLASMAS;

OXYGEN;

EID: 84867574067     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2012.2208766     Document Type: Article

References (24)

1. A. Grill, "Diamond-like carbon: State of the art," Diam. Relat. Mater., vol. 8, no. 2-5, pp. 428-434, Mar. 1999. (Pubitemid 129310283)
2. C. Weissmantel, K. Bewilogua, K. Breuer, D. Dietrich, U. Ebersbach, H. J. Erler, B. Rau, and G. Reisse, "Preparation and properties of hard i-C and i-BN coatings," Thin Solid Films, vol. 96, no. 1, pp. 31-44, Oct. 1982. (Pubitemid 13460722)
3. T. Nakatani, K. Okamoto, A. Araki, and T. Washimi, "Application of diamond-like carbon to a rotary engine," New Diamond Frontier Carbon Technol., vol. 16, no. 4, pp. 187-200, 2006. (Pubitemid 46160384)
4. D. P. Maguire, "Mechanical stability, corrosion performance and bioresponse of amorphous diamond-like carbon for medical stents and guidewires," Diam. Relat. Mater., vol. 14, no. 8, pp. 1277-1288, Aug. 2005.
5. R. Hauert, "A review of modified DLC coatings for biological applications," Diam. Relat. Mater., vol. 12, no. 3-7, pp. 583-589, Mar.-Jul. 2003. (Pubitemid 36619251)
6. T. Nakatani, K. Okamoto, I. Omura, and S. Yamashita, "Imparting superhydrophilicity to diamond-like carbon by plasma surface treatment technique," New Diamond Frontier Carbon Technol., vol. 17, no. 6, pp. 289-300, 2007. (Pubitemid 351585210)
7. Y. Nitta, K. Okamoto, T. Nakatani, H. Hoshi, A. Homma, E. Tatsumi, and Y. Taenaka, "Diamond-like carbon thin film with controlled zeta potential for medical material application," Diam. Relat. Mater., vol. 17, no. 11, pp. 1972-1976, Nov. 2008.
8. T. Nakatani, K. Okamoto, Y. Nitta, A. Mochizuki, H. Hoshi, and A. Homma, "Surface engineering by plasma techniques of DLC for medical materials and blood-compatibility evaluation," J. Photopolym. Sci. Technol., vol. 21, no. 2, pp. 225-230, 2008.
9. A. Mochizuki, T. Ogawa, K. Okamoto, T. Nakatani, and Y. Nitta, "Blood compatibility of gas plasma-treated diamond-like carbon surface - Effect of physicochemical properties of DLC surface on blood compatibility," Mater. Sci Eng. C, vol. 31, no. 3, pp. 567-573, Apr. 2011.
10. A. von Keudell and W. Jacob, "Interaction of hydrogen plasmas with hydrocarbon films, investigated by infrared spectroscopy using an optical cavity substrate," J. Vac. Sci. Technol. A, vol. 15, no. 2, pp. 402-407, Mar./Apr. 1997.
11. A. von Keudell and W. Jacob, "Growth and erosion of hydrocarbon films investigated by in situ ellipsometry," J. Appl. Phys., vol. 79, no. 2, pp. 1092-1098, Jan. 1996. (Pubitemid 126571742)
12. Y. J. Chabal, "Surface infrared spectroscopy," Surf. Sci. Rep., vol. 8, no. 5-7, pp. 211-357, May 1988.
13. M. Shinohara, Y. Kimura, M. Saito, and M. Niwano, "Infrared spectroscopy study of adsorption of silane on Si(0 0 1)," Sur. Sci., vol. 502/503, pp. 96-101, Apr. 2002. (Pubitemid 34306482)
14. M. Shinohara, A. Seyama, Y. Kimura, M. Niwano, and M. Saito, "Formation and decomposition of Si hydrides during adsorption of Si2H6 onto Si(100)(2 × 1)," Phys. Rev. B, vol. 65, no. 7, p. 075319, 2002.
15. M. Shinohara, H. Kawazoe, T. Inayoshi, T. Kawakami, Y. Matsuda, H. Fujiyama, Y. Nitta, and T. Nakatani, "Difference of deposition process of an amorphous carbon film due to source gases," Thin Solid Films, vol. 518, no. 13, pp. 3497-3501, Apr. 2010.
16. M. Shinohara, K. Cho, Y. Matsuda, T. Inayoshi, H. Kawazoe, H. Fujiyama, Y. Nitta, and T. Nakatani, "Substrate temperature effects on amorphous carbon film growth, investigated by infrared spectroscopy in multiple internal reflection geometry," J. Vac. Sci. Technol. A, vol. 27, no. 4, pp. 813-817, Jul. 2009.
17. G. Socrates, Infrared and Raman Characteristic Group Frequencies Tables and Charts, 3rd ed. Chichester, U.K.: Wiley.
18. D. B. Mawhinney and J. T. Yates, Jr., "FTIR study of the oxidation of amorphous carbon by ozone at 300 K - Direct COOH formation," Carbon, vol. 39, no. 8, pp. 1167-1173, Jul. 2001. (Pubitemid 32427159)
19. P. Neeb, O. Horie, and G. K. Moortgat, "The ethene-ozone reaction in the gas phase," J. Phys. Chem. A, vol. 102, no. 34, pp. 6778-6785, 1998. (Pubitemid 128604937)
20. O. V. Manoilova, J. C. Lavalley, N. M. Tsyganenko, and A. A. Tsyganeko, "Low-temperature IR study of ozone interaction with ethylene adsorbed on silica," Langmuir, vol. 14, no. 20, pp. 5813-5820, 1998.
21. G. Speranza, S. Torrengo, M. Filippi, L.Minati, E. Vittone, A. Pasquarelli, M. Dipalo, and E. Kohn, "In situ thermal treatment of UV-oxidized diamond hydrogenated surface," Surf. Sci., vol. 604, no. 9/10, pp. 753-761, May 2010.
22. D. R. Tallant, J. E. Parmeter, M. P. Siegal, and R. L. Simpson, "The thermal stability of diamond-like carbon," Diam. Relat. Mater., vol. 4, no. 3, pp. 191-199, Apr. 1995.
23. M. Shinohara, K. Iwatsuji, T. Katagiri, H. Shibata, K. Cho, Y. Matsuda, and H. Fujiyama, "Infrared spectroscopic study of thermal annealing effects of hydrocarbon species on a Si surface exposed to methane plasma," Appl. Surf. Sci., vol. 252, no. 24, pp. 8589-8592, Oct. 2006. (Pubitemid 44442528)
24. D.-Y. Yun, W.-S. Choi, Y.-S. Park, and B.-G. Hong, "Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film," Appl. Surf. Sci., vol. 254, no. 23, pp. 7925-2928, Sep. 2008.