SCOPUS 정보 검색 플랫폼

Dalton Transactions

Volumn 41, Issue 43, 2012, Pages 13496-13503

Chemical vapour deposition of amorphous Ru(P) thin films from Ru trialkylphosphite hydride complexes

(4) McCarty, W Jeffrey a Yang, Xiaoping a Depue Anderson, Lauren J a Jones, Richard A a

a UNIVERSITY OF TEXAS AT AUSTIN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS ALLOYS; AMORPHOUS FILMS; AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; HYDRIDES; PHOSPHORUS; RUTHENIUM; RUTHENIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

AS-DEPOSITED FILMS; CARRIER GAS; CHEMICAL VAPOUR DEPOSITION; DEPOSITION CONDITIONS; DEPOSITION OF FILMS; FLOWING STREAMS; HYDRIDE COMPLEXES; LIGAND CHEMISTRY; OXIDATION STATE; POLYCRYSTALLINE; RELATIVE CONCENTRATION; X-RAY AMORPHOUS; XPS ANALYSIS;

RUTHENIUM ALLOYS;

EID: 84867500486 PISSN: 14779226 EISSN: 14779234 Source Type: Journal
DOI: 10.1039/c2dt31541f Document Type: Article

Times cited : (5)

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