Highly sensitive SnO 2 porous film gas sensors fabricated by plasma spray physical vapor deposition

Sensors and Actuators, B: Chemical

Volumn 173, Issue , 2012, Pages 455-461

  Iizuka, Kazuyuki ^a,b   Kambara, Makoto ^a   Yoshida, Toyonobu ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b Uchiya Thermostat Co Ltd   (Japan)

Author keywords

Formaldehyde; Gas sensor modeling; Physical vapor deposition; Porous structure; Sensor geometry; Tin oxide

Indexed keywords

APPLIED VOLTAGES; CURRENT CHANGE; CURRENT DENSITY DISTRIBUTION; ELECTRODE GAP; FILM STRUCTURE; FILM SURFACES; GAP SIZE; GAS DIFFUSION; GAS PERMEATION; GAS SENSOR MODELING; GEOMETRY OPTIMIZATION; LOCAL TEMPERATURE; OPERATING TEMPERATURE; OPTIMAL SENSOR; PLASMA SPRAY; POROUS FILM; POROUS STRUCTURES; SENSOR DESIGNS; SENSOR FILMS; SENSOR GEOMETRIES; SENSOR MODEL; SENSOR PROPERTIES; SYNERGIC EFFECTS; TARGET GAS;

FORMALDEHYDE; GAS DETECTORS; PHYSICAL VAPOR DEPOSITION; PLASMA JETS; PLASMA SPRAYING; THICK FILMS; TIN; TIN OXIDES; VAPORS;

CHEMICAL SENSORS;

EID: 84867079054     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.07.060     Document Type: Article

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