Biasing voltage dependence of sensitivity of electron beam evaporated SnO2 thin film CO sensor

Sensors

Volumn 6, Issue 9, 2006, Pages 1153-1160

  Durrani, Sardar M Ayub ^a  

^a KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS   (Saudi Arabia)

Author keywords

CO sensor; Semiconductor sensor; Thin film

Indexed keywords

AMORPHOUS FILMS; CONDUCTIVE PLASTICS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRON BEAMS; FILM THICKNESS; OXIDE FILMS; SCHOTTKY BARRIER DIODES; TIN; TIN OXIDES; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

BIASING VOLTAGES; CO SENSING; CO SENSORS; ELECTRON BEAM EVAPORATION; SCHOTTKY BARRIERS; SEMICONDUCTOR SENSORS; SEMICONDUCTOR-METAL INTERFACES; TIN OXIDE THIN FILM;

THIN FILMS;

EID: 33749554864     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s6091153     Document Type: Article

References (16)

1. Durrani, S. M. A.; Al-Kuhaili, M. F.; Khawaja, E. E. CO-sensing properties of undoped and doped tin oxide thin films prepared by electron beam evaporation. Talanta, 2005, 65, 1162-1167.
2. 2-rich gases. Sensors and Actuators 2004, B103, 104-110.
3. Mandayo, G. G.; Castano E.; Gracia, F.J.; Cirera,A.; Cornet, A.; Morante, J.R. Strategies to enhance the carbon monoxide sensitivity of tin oxide thin films. Sensors and Actuators 2003, B95, 90-96.
4. 2 thin films: analysis of the metal aggregate size effect. Sensors and Actuators 1999, B59, 210-115.
5. Sharma, R. K.; Chan, P. C. H.; Tang, Z.; Yan,G.; Hsing, I. M.; Sin, J. K. O. Sensitive, selective and stable tin dioxide thin-films for carbon monoxide and hydrogen sensing in integrated gas sensor array applications. Sensors and Actuators 2001, B72, 160-166.
6. Becker, Th.; Ahlers, S.; Bosch-v. Braünmuhl, Chr.; Müller, G.; Kiesewetter, O. Gas sensing properties of thin- and thick-film tin-oxide materials. Sensors and Actuators 2001, B77, 55-61
7. Montmeat,P.; Marchand, J-C; Lalauze, R.; Viricelle, J-P; Tournier G.; Pijolat, C. Physico-chemical contribution of gold metallic particles to the action of oxygen on tin dioxide sensors. Sensors and Actuators 2003, B95, 83-89.
8. Mishra, V. N.; Agarwal, R. P. Effect of electrode material on sensor response. Sensors and Actuator's 1994, B22, 121-125.
9. P. Dutronc, B. Carbonne, F. Menil, C. Lucat, Influence of the nature of the screen-printed electrode metal on the transport and detection properties of thick-film semiconductor gas sensors. Sensors and Actuators 1992, B 6, 279-284.
10. Durrani, S. M. A. The influence of electrode metals and its configuration on the sensitivity of tin oxide thin film CO sensor. Talanta 2006, 68, 1732-1735.
11. Khawaja, E. E.; Bouamrane, F.; Hallak, A. B.; Daous, M. A.; Salim, M. A. Observation of oxygen enrichment in zirconium oxide films. J. Vac. Sci. Tech. 1993, A11, 580-587.
12. 3 films. J. Appl. Phys. 2000, 87, 7252-7254.
13. Al-Kuhaili, M. F., Durrani, S. M. A. and Khawaja, E. E. Optical Properties of Hafnium Oxide Films Prepared by Electron Beam Evaporation. J. Phys. D: Appl. Phys. 2004, 37, 1254-1261.
14. Becker, Th., Ahlers, S., Bosch-v.Braunmühl, Chr., Müller, G. and Kiesewetter, O. Gas sensing properties of thin- and thick-film tin-oxide materials, Sensors and Actuators 2001, B77, 55-51.
15. Akbar, S. A. and Younkman L. B. Sensing mechanism of a titania-based CO sensor. J. Electrochemical Society 1997, 144, 1750-1753.
16. 2-based sensor on their sensing properties. Sensors and Actuators 1993, B13, 128-131.