Growth of tin oxide thick films by plasma spray physical vapor deposition

Sensors and Actuators, B: Chemical

Volumn 155, Issue 2, 2011, Pages 551-556

  Iizuka, Kazuyuki ^a,b   Kambara, Makoto ^a   Yoshida, Toyonobu ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b Uchiya Thermostat Co Ltd   (Japan)

Author keywords

Gas sensor; Nanostructure; Physical vapor deposition; Tin oxide

Indexed keywords

COLUMNAR STRUCTURES; DEPOSITION CONDITIONS; FEEDING RATE; FILM MICROSTRUCTURES; GAS SENSORS; GRANULAR GRAINS; HIGH SENSITIVITY; LOCAL STRUCTURE; OXYGEN FLOW RATES; OXYGEN GAS; PLASMA SPRAY; POWDER FEEDING; RAW POWDERS;

CHEMICAL SENSORS; FEEDING; FLOW RATE; GAS DETECTORS; OXYGEN; PHYSICAL VAPOR DEPOSITION; PLASMA DEPOSITION; PLASMA JETS; PLASMA SPRAYING; PROTECTIVE COATINGS; THICK FILMS; TIN; TIN OXIDES;

OXIDE FILMS;

EID: 79957829863     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.01.006     Document Type: Article

References (23)

1. 2 nanotubular materials by a sonochemical method for gas sensors J. Nanopart. Res. 12 2010 1389 1400
2. 2 nanopowder homogenously doped with Pt nanoparticles Curr. Appl. Phys. 9 2009 S79 S81
3. T. Chen, Q.J. Liu, Z.L. Zhou, and Y.D. Wang The fabrication and gas-sensing characteristics of the formaldehyde gas sensors with high sensitivity Sens. Actuators B 131 2008 301 305 (Pubitemid 351458655)
4. K. Ihokura, and J. Watson The Stannic Oxide Gas Sensors - Principles and Applications 1994 CRC Press Florida
5. 2 powder for gas sensor application Sens. Actuators B 108 2005 56 61 (Pubitemid 40743667)
6. V.V. Kissine, S.A. Voroshilov, and V.V. Sysoev Oxygen flow effect on gas sensitivity properties of tin oxide film prepared by r.f. sputtering Sens. Actuators B 55 1999 55 59
7. x nanoparticles and characterization J. Alloys Compd. 470 2009 289 293
8. K. Lee, D. Lee, and H. Ahn X.R.D. and TEM studies on tin oxide (II) nanoparticles prepared by inert gas condensation Mater. Lett. 58 2004 3122 3125
9. 2 nanocrystalline powders by the gas phase condensation method Sens. Actuators B 31 1996 29 32 (Pubitemid 126397497)
10. x thin films using various tin precursors Thin Solid Films 516 2008 4720 4727 (Pubitemid 351601799)
11. C.G. Borman, and R.G. Gordon Reactive pathways in the chemical vapor deposition of tin oxide films by tetramethyltin oxidation J. Electrochem. Soc. 136 1989 3820 3828 (Pubitemid 20632761)
12. S. Suh, Z. Zhang, W.-K. Chu, and D.M. Hoffman Atmospheric-pressure chemical vapor deposition of fluorine-doped tin oxide thin films Thin Solid Films 345 1999 240 243
13. J. Wang, L. Liu, S.-Y. Cong, J.-Q. Qi, and B.-K. Xu An enrichment method to detect low concentration formaldehyde Sens. Actuators B 134 2008 1010 1015
14. Z. Jin, H.-J. Zhou, Z.-L. Jin, R.F. Savinell, and C.-C. Liu Application of nano-crystalline porous tin oxide thin film for CO sensing Sens. Actuators B 52 1998 188 194 (Pubitemid 128457020)
15. 2 thin film with low operating temperature prepared by sol-gel technique Sens. Actuators B 134 2008 57 61
16. T. Yoshida Toward a new era of plasma spray processing Pure Appl. Chem. 78 2006 1093 1107
17. H. Huang, K. Eguchi, M. Kambara, and T. Yoshida Ultrafast thermal plasma physical vapordeposition of yttria-stabilized zirconia for novel thermal barrier coatings J. Therm. Spray Technol. 15 2006 83 91
18. C.W. Bale, P. Chartrand, S.A. Degterov, G. Eriksson, K. Hack, R. Ben Mahfoud, J. Melanon, A.D. Pelton, and S. Petersen Factsage thermochemical software and databases CALPHAD 26 2002 189 228
19. M.S. Moreno, R.C. Mercader, and A.G. Bibiloni Study of intermediate oxides in SnO thermal decomposition J. Phys. Condens. Matter 4 1992 351 355
20. 2 cubes based on aggration of nanorods Mater. Lett. 62 2008 2411 2414
21. A.R. Stokes A numerical Fourier-analysis method for the correction of widths and shapes of lines on X-ray powder photographs Proc. Phys. Soc. Lond. 61 1948 382 391
22. G. Sakai, N. Matsunaga, K. Shimanoe, and N. Yamazoe Theory of gas-diffusion controlled sensitivity for thin film semiconductor gas sensor Sens. Actuators B 80 2001 125 131 (Pubitemid 32951428)
23. 3 thick-film-based sensor for the detection of VOC Sens. Actuators B 108 2005 97 101