A tribological study of SU-8 micro-dot patterns printed on Si surface in a flat-on-flat reciprocating sliding test

Tribology Letters

Volumn 44, Issue 2, 2011, Pages 167-176

  Beng, Nam ^a   Minn, Tay Myo ^a   Sinha, Sujeet K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Micropatterning; SU 8; Tribology

Indexed keywords

MICRO PATTERNING; NORMAL LOADS; PERFLUOROPOLYETHERS; RECIPROCATING SLIDING; ROTATIONAL SPEED; SI SUBSTRATES; SI SURFACES; SLIDING TEST; SU-8; TRIBOLOGICAL PROPERTIES; TRIBOMETERS; ULTRATHIN LAYERS; WEAR LIFE;

OPTIMIZATION; TRIBOLOGY;

SILICON;

EID: 84867034576     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-011-9835-1     Document Type: Article

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